| 1. |
- Errando-Herranz, Carlos, et al.
(författare)
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Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE
- 2013
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Ingår i: Optics Express. - : Optical Society of America. - 1094-4087. ; 21:18, s. 21293-21298
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Tidskriftsartikel (refereegranskat)abstract
- We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production methods. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light coupling allows matching the size scale of microfluidics to that of current silicon photonic biosensors. To demonstrate the new method, we performed successful refractive index measurements of liquid ethanol and methanol samples, using the fabricated device. The minimum required sample volume for refractive index measurement is below one nanoliter.
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| 2. |
- Errando-Herranz, Carlos, et al.
(författare)
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Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE
- 2013
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Ingår i: Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers). - : IEEE conference proceedings. ; , s. 1613-1616
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Konferensbidrag (refereegranskat)abstract
- We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.
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| 3. |
- Errando-Herranz, Carlos, et al.
(författare)
-
Integration of polymer microfluidics with silicon photonic biosensors by one-step combined photopatterning and molding of OSTE
- 2013
-
Konferensbidrag (refereegranskat)abstract
- We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.
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| 4. |
- Gylfason, Kristinn B., 1978-, et al.
(författare)
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Reducing the temperature sensitivity of SOI waveguide-based biosensors
- 2012
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Ingår i: Silicon Photonics and Photonic Integrated Circuits III. - : SPIE - International Society for Optical Engineering. - 9780819491237 ; , s. 84310-84310
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Konferensbidrag (refereegranskat)abstract
- Label-free photonic biosensors fabricated on silicon-on-insulator (SOI) can provide compact size, high evanescent field strength at the silicon waveguide surface, and volume fabrication potential. However, due to the large thermo optic coefficient of water-based biosamples, the sensors are temperature-sensitive. Consequently, active temperature control is usually used. However, for low cost applications, active temperature control is often not feasible. Here, we use the opposite polarity of the thermo-optic coefficients of silicon and water to demonstrate a photonic slot waveguide with a distribution of power between sample and silicon that aims to give athermal operation in water. Based on simulations, we made three waveguide designs close to the athermal point, and asymmetric integrated Mach- Zehnder interferometers for their characterization. The devices were fabricated on SOI with a 220 nm device layer and 2 ï¿œm buried oxide, by electron beam lithography of hydrogen silsesquioxane (HSQ) resist, and etching in a Cl2/HBr/O2/He plasma. With Cargile 50350 fused silica matching oil as top cladding, the group index of the three guides varies from 1.9 to 2.8 at 1550 nm. The temperature sensitivity of the devices varied from -70 to -160 pm/K under the same conditions. A temperature sensitivity of -2 pm/K is projected with water as top cladding.
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