| 1. |
- Achenbach, Jan-Ole, et al.
(författare)
-
Correlative Experimental and Theoretical Investigation of the Angle-Resolved Composition Evolution of Thin Films Sputtered from a Compound Mo2BC Targe
- 2019
-
Ingår i: Coatings. - : MDPI AG. - 2079-6412. ; 9:3
-
Tidskriftsartikel (refereegranskat)abstract
- The angle-resolved composition evolution of Mo-B-C thin films deposited from a Mo2BC compound target was investigated experimentally and theoretically. Depositions were carried out by direct current magnetron sputtering (DCMS) in a pressure range from 0.09 to 0.98 Pa in Ar and Kr. The substrates were placed at specific angles α with respect to the target normal from 0 to ±67.5°. A model based on TRIDYN and SIMTRA was used to calculate the influence of the sputtering gas on the angular distribution function of the sputtered species at the target, their transport through the gas phase, and film composition. Experimental pressure- and sputtering gas-dependent thin film chemical composition data are in good agreement with simulated angle-resolved film composition data. In Ar, the pressure-induced film composition variations at a particular α are within the error of the EDX measurements. On the contrary, an order of magnitude increase in Kr pressure results in an increase of the Mo concentration measured at α = 0° from 36 at.% to 43 at.%. It is shown that the mass ratio between sputtering gas and sputtered species defines the scattering angle within the collision cascades in the target, as well as for the collisions in the gas phase, which in turn defines the angle- and pressure-dependent film compositions.
|
|
| 2. |
- Aghda, Soheil Karimi, et al.
(författare)
-
Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films
- 2023
-
Ingår i: Acta Materialia. - : Elsevier. - 1359-6454 .- 1873-2453. ; 250
-
Tidskriftsartikel (refereegranskat)abstract
- Ion-irradiation-induced changes in structure, elastic properties, and thermal stability of metastable c-(Ti,Al)N thin films synthesized by high-power pulsed magnetron sputtering (HPPMS) and cathodic arc deposition (CAD) are systematically investigated by experiments and density functional theory (DFT) simulations. While films deposited by HPPMS show a random orientation at ion kinetic energies (Ek)>105 eV, an evolution towards (111) orientation is observed in CAD films for Ek>144 eV. The measured ion energy flux at the growing film surface is 3.3 times larger for CAD compared to HPPMS. Hence, it is inferred that formation of the strong (111) texture in CAD films is caused by the ion flux-and ion energy-induced strain energy minimization in defective c-(Ti,Al)N. The ion energy-dependent elastic modulus can be rationalized by considering the ion energy-and orientation -dependent formation of point defects from DFT predictions: The balancing effects of bombardment-induced Frenkel defects formation and the concurrent evolution of compressive intrinsic stress result in the apparent independence of the elastic modulus from Ek for HPPMS films without preferential orientation. However, an ion energy-dependent elastic modulus reduction of similar to 18% for the CAD films can be understood by considering the 34% higher Frenkel pair concentration formed at Ek=182 eV upon irradiation of the experimentally observed (111)-oriented (Ti,Al)N in comparison to the (200)-configuration at similar Ek. Moreover, the effect of Frenkel pair concentration on the thermal stability of metastable c-(Ti,Al)N is investigated by differential scanning calorimetry: Ion-irradiation-induced increase in Frenkel pairs concentration retards the wurtzite formation temperature by up to 206 degrees C.
|
|
| 3. |
- Azina, Clio, et al.
(författare)
-
Oxidation behaviour of V2AlC MAX phase coatings
- 2020
-
Ingår i: Journal of the European Ceramic Society. - : ELSEVIER SCI LTD. - 0955-2219 .- 1873-619X. ; 40:13, s. 4436-4444
-
Tidskriftsartikel (refereegranskat)abstract
- We report on the oxidation behaviour of V2AlC coatings up to 800 degrees C, in air. The coatings were deposited at 580 degrees C using magnetron sputtering from a powder metallurgical composite V2AlC target and were subsequently oxidised for 5, 15 and 30 min. The microstructural evolution of the samples was investigated, and X-ray diffraction patterns were collected to track the formation of oxides. The first indications of oxidation appear after just 15 min at 500 degrees C, as V-based oxides grew on the surface of the coatings. Later, the presence of mostly V-based oxides and ternary (V, Al)-oxides was observed starting after 5 min at 600 degrees C. Further analyses confirmed outward diffusion of V and inward diffusion of O, while Al tends to sublimate. alpha-A12O3 was only indexed after 5 min at 800 degrees C. Ex-situ electrical resistivity measurements allowed tracking the oxidation progress of the V2AlC coating.
|
|
| 4. |
- Bakhit, Babak, 1983-, et al.
(författare)
-
Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
- 2021
-
Ingår i: Vacuum. - : Elsevier. - 0042-207X .- 1879-2715. ; 186
-
Tidskriftsartikel (refereegranskat)abstract
- There is a need for developing synthesis techniques that allow the growth of high-quality functional films at low substrate temperatures to minimize energy consumption and enable coating temperature-sensitive substrates. A typical shortcoming of conventional low-temperature growth strategies is insufficient atomic mobility, which leads to porous microstructures with impurity incorporation due to atmosphere exposure, and, in turn, poor mechanical properties. Here, we report the synthesis of dense Ti0.67Hf0.33B1.7 thin films with a hardness of ∼41.0 GPa grown without external heating (substrate temperature below ∼100 °C) by hybrid high-power impulse and dc magnetron co-sputtering (HfB2-HiPIMS/TiB2-DCMS) in pure Ar on Al2O3(0001) substrates. A substrate bias potential of −300 V is synchronized to the target-ion-rich portion of each HiPIMS pulse. The limited atomic mobility inherent to such desired low-temperature deposition is compensated for by heavy-mass ion (Hf+) irradiation promoting the growth of dense Ti0.67Hf0.33B1.7.
|
|
| 5. |
- Bonninghoff, Niklas, et al.
(författare)
-
ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
- 2021
-
Ingår i: Surface & Coatings Technology. - : ELSEVIER SCIENCE SA. - 0257-8972 .- 1879-3347. ; 412
-
Tidskriftsartikel (refereegranskat)abstract
- High-power impulse magnetron sputtering (HiPIMS) is a thin film deposition technique that combines the advantages of energetic deposition methods with magnetron sputtering. HiPIMS has so far mostly been utilized for the growth of crystalline coatings. Here we offer a study devoted to metallic glasses, in which we compare Zr60Cu25Al10Ni5 (target composition) thin films deposited by conventional direct current magnetron sputtering (DC) and HiPIMS. Film microstructure is strongly dependent on the choice of the sputtering method. The DC layers show a columnar structure with intra-columnar porosity, which provides a pathway for oxygen diffusion into the film. In contrast, HiPIMS films are column-free and possess about 4% higher density, as revealed by X-ray reflectivity. Electron diffraction reveals a decrease in average atomic spacing for the latter film of about 12%. These differences in film properties and morphology can be attributed to an increase in ad-atom mobility during HiPIMS caused by an increase in ion energy and flux of the film-forming species enabling a more efficient energy and momentum transfer to the growing film surface. The relative contribution of metallic and hence film forming ions to the overall ion flux of the DC plasma compared to the HiPIMS plasma is 13% and 96%, respectively. Additionally, a substrate bias causes the ionized film forming species during HiPIMS to arrive close to the substrate normal reducing shadowing effects. Different microstructures have a direct effect on the average roughness values, which for DC and HiPIMS films are 1.4 nm and 0.2 nm, respectively. The indentation hardness H and Youngs modulus E are higher for the HiPIMS sample, at 9.2 +/- 0.3 GPa and 131.6 +/- 3.6 GPa, respectively. The increase in hardness for the HiPIMS sample as compared to the DC sample (similar to 35%) can be attributed to higher film density, compressive (HiPIMS) as opposed to tensile (DC) stress and the lack of a columnar structure.
|
|
| 6. |
- Charalampopoulou, Evangelia, et al.
(författare)
-
Early stages of dissolution corrosion in 316L and DIN 1.4970 austenitic stainless steels with and without anticorrosion coatings in static liquid lead-bismuth eutectic (LBE) at 500 degrees C
- 2021
-
Ingår i: Materials Characterization. - : ELSEVIER SCIENCE INC. - 1044-5803 .- 1873-4189. ; 178
-
Tidskriftsartikel (refereegranskat)abstract
- This work addresses the early stages (<= 1000 h) of the dissolution corrosion behavior of 316L and DIN 1.4970 austenitic stainless steels in contact with oxygen-poor (C-O < 10(-8) mass%), static liquid lead-bismuth eutectic (LBE) at 500 degrees C for 600-1000 h. The objective of this study was to determine the relative early-stage resistance of the uncoated steels to dissolution corrosion and to assess the protectiveness of select candidate coatings (Cr2AlC, Al2O3, V2AlxCy). The simultaneous exposure of steels with intended differences in microstructure and thermomechanical state showed the effects of steel grain size, density of annealing/deformation twins, and secondary precipitates on the steel dissolution corrosion behavior. The findings of this study provide recommendations on steel manufacturing with the aim of using the steels to construct Gen-IV lead-cooled fast reactors.
|
|
| 7. |
- Chien, Yu-Ping, et al.
(författare)
-
Deviations between film and target compositions induced by backscattered Ar during sputtering from M-2-Al-C (M = Cr, Zr, and Hf) composite targets
- 2022
-
Ingår i: Surface & Coatings Technology. - : Elsevier. - 0257-8972 .- 1879-3347. ; 446
-
Tidskriftsartikel (refereegranskat)abstract
- M-Al-C (M = Cr, Zr, and Hf) thin films are deposited from stoichiometric M2AlC composite targets by direct current magnetron sputtering (DCMS) and high power pulsed magnetron sputtering (HPPMS) in an industrial coater. Using DCMS it is observed that the composition of the Cr-Al-C film is close to stoichiometric, while the Al concentration in the Zr-Al-C and Hf-Al-C films is significantly reduced compared to the Al concentration in the targets. It is evident that the magnitude of the difference in Al concentration between the target and the cor-responding film composition is strongly dependent on the atomic mass of the transition metal. Zr and Hf atoms are 1.8 and 3.4 times heavier than Cr. In HPPMS, the target potential is approximately 1.6 times larger than that in DCMS, which can result in the film compositions deviating even stronger from the target composition as compared to DCMS. The Zr-Al-C thin film deposited by HPPMS exhibits a larger Al-deficiency than the film deposited by DCMS. The energy distributions of backscattered Ar neutrals are simulated by utilizing a two-body collision model and the Transport of Ions in Matter (TRIM) code. Based on the simulation results the experimentally observed Al -deficient film compositions can be readily explained: As the mass of the transition metal in the target is increased, both, energy and flux of the (at the target) reflected Ar is increased causing preferential re-sputtering of Al in the films. As stoichiometric compositions are a prerequisite for the formation of single-phase compound thin films it is evident that composite targets with a transition metal mass-dependent Al-overstoichiometry are required to compensate the Al-loss induced by the energetic Ar neutrals.
|
|
| 8. |
- Greczynski, Grzegorz, et al.
(författare)
-
Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth
- 2019
-
Ingår i: Coatings. - : MDPI. - 2079-6412. ; 9:1
-
Tidskriftsartikel (refereegranskat)abstract
- The performance of transition metal nitride based coatings deposited by magnetron sputtering, in a broad range of applications including wear-protective coatings on cutting tools and components in automotive engines, is determined by their phase content. The classical example is the precipitation of thermodynamically-favored wurtzite-AlN while alloying TiN with Al to obtain ternary single phase NaCl-structure films with improved high-temperature oxidation resistance. Here, we report on reactive high-power impulse and direct current magnetron co-sputtering (HiPIMS/DCMS) growth of Ti0.31Al0.69N and Zr0.48Al0.52N thin films. The Al concentrations are intentionally chosen to be higher than theoretically predicted solubility limits for the rock salt structure. The goal is to investigate the effect of the incident Al+ energy E-Al(+), controlled by varying the amplitude of the substrate bias applied synchronously with the Al+-rich portion of the ion flux from the Al-HiPIMS source, on the crystalline phase formation. For EAl+ amp;lt;= 60 eV, films contain predominantly the wurtzite phase. With increasing E-Al(+), and thus, the Al subplantation depth, the relative fraction of the NaCl structure increases and eventually for E-Al(+) amp;gt; 250 eV, Ti0.31Al0.69N and Zr0.48Al0.52N layers contain more than 95% of the rock salt phase. Thus, the separation of the film forming species in time and energy domains determines the phase formation of Ti0.31Al0.69N and Zr0.48Al0.52N layers and enables the growth of the cubic phase outside of the predicted Al concentration range. The new film growth concept can be applied to the entire family of multinary transition metal aluminum nitrides, where one of the metallic film constituents is available in the ionized form while the other arrives as neutral.
|
|
| 9. |
- Holzapfel, Damian M., et al.
(författare)
-
Influence of ion irradiation-induced defects on phase formation and thermal stability of Ti0.27Al0.21N0.52 coatings
- 2022
-
Ingår i: Acta Materialia. - : Elsevier. - 1359-6454 .- 1873-2453. ; 237
-
Tidskriftsartikel (refereegranskat)abstract
- The influence of changes induced by ion irradiation on structure and thermal stability of metastable cubic (Ti,Al)N coatings deposited by cathodic arc evaporation is systematically investigated by correlating experiments and theory. Decreasing the nitrogen deposition pressure from 5.0 to 0.5 Pa results in an ion flux-enhancement by a factor of three and an increase of the average ion energy from 15 to 30 eV, causing the stress-free lattice parameter to expand from 4.170 to 4.206 Å, while the chemical composition of Ti0.27Al0.21N0.52 remains unchanged. The 0.9% lattice parameter increase is a consequence of formation of Frenkel pairs induced by ion bombardment, as revealed by density functional theory (DFT) simulations. The influence of the presence of Frenkel pairs on the thermal stability of metastable Ti0.27Al0.21N0.52 is investigated by scanning transmission electron microscopy, differential scanning calorimetry, atom probe tomography and in-situ synchrotron X-ray powder diffraction. It is demonstrated that the ion flux and ion energy induced formation of Frenkel pairs increases the thermal stability as the Al diffusion enabled crystallization of the wurtzite solid solution is retarded. This can be rationalized by DFT predictions since the presence of Frenkel pairs increases the activation energy for Al diffusion by up to 142%. Hence, the thermal stability enhancement is caused by a hitherto unreported mechanism - the Frenkel pair impeded Al mobility and thereby retarded formation of wurtzite solid solution.
|
|
| 10. |
- Hu, Chun, et al.
(författare)
-
Influence of co-sputtering AlB2 to TaB2 on stoichiometry of non-reactively sputtered boride thin films
- 2024
-
Ingår i: Materials Research Letters. - : TAYLOR & FRANCIS INC. - 2166-3831. ; 12:8, s. 561-570
-
Tidskriftsartikel (refereegranskat)abstract
- Transition metal diboride thin films are promising functional materials for their outstanding mechanical properties and thermal stability. By combining experiment and simulations, we discuss angular distribution of the sputtered species, their scattering in the gas phase, re-sputtering and potential evaporation from the grown films for the complex evolution of film compositions, as well as energetic preference for vacancy formation and competing phases as factors for governing the phase constitution. By co-sputtering from two compound targets, we developed phase-pure crystalline (Ta,Al)B2 solid solution thin films and correlate the stoichiometry changes with the evolution of their microstructure, hardness, and elastic modulus. {GRAPHICAL ABSTRACT}
|
|
