SwePub
Sök i SwePub databas

  Utökad sökning

Träfflista för sökning "WFRF:(Mu Fengwen) "

Sökning: WFRF:(Mu Fengwen)

  • Resultat 1-1 av 1
Sortera/gruppera träfflistan
   
NumreringReferensOmslagsbildHitta
1.
  • Lin, Jiajie, et al. (författare)
  • Wafer-scale heterogeneous integration InP on trenched Si with a bubble-free interface
  • 2020
  • Ingår i: APL Materials. - : AIP Publishing. - 2166-532X. ; 8:5
  • Tidskriftsartikel (refereegranskat)abstract
    • Heterogeneous integration of compound semiconductors on a Si platform leads to advanced device applications in the field of Si photonics and high frequency electronics. However, the unavoidable bubbles formed at the bonding interface are detrimental for achieving a high yield of dissimilar semiconductor integration by the direct wafer bonding technology. In this work, lateral outgassing surface trenches (LOTs) are introduced to efficiently inhibit the bubbles. It is found that the chemical reactions in InP-Si bonding are similar to those in Si-Si bonding, and the generated gas can escape via the LOTs. The outgassing efficiency is dominated by LOTs' spacing, and moreover, the relationship between bubble formation and the LOT's structure is well described by a thermodynamic model. With the method explored in this work, a 2-in. bubble-free crystalline InP thin film integrated on the Si substrate with LOTs is obtained by the ion-slicing and wafer bonding technology. The quantum well active region grown on this Si-based InP film shows a superior photoemission efficiency, and it is found to be 65% as compared to its bulk counterpart.
  •  
Skapa referenser, mejla, bekava och länka
  • Resultat 1-1 av 1
Typ av publikation
tidskriftsartikel (1)
Typ av innehåll
refereegranskat (1)
Författare/redaktör
Wang, Shu Min, 1963 (1)
Liang, Hao (1)
Huang, Hao (1)
Huang, Kai (1)
Gao, Peng (1)
Ou, Xin (1)
visa fler...
Lin, Jiajie (1)
Zhao, Xiaomeng (1)
You, Tiangui (1)
Zhang, Jiaxiang (1)
WAN, WENJIAN (1)
Jin, Tingting (1)
Zhou, Min (1)
Mu, Fengwen (1)
Yan, Youquan (1)
visa färre...
Lärosäte
Chalmers tekniska högskola (1)
Språk
Engelska (1)
Forskningsämne (UKÄ/SCB)
Naturvetenskap (1)
År
2020 (1)

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

 
pil uppåt Stäng

Kopiera och spara länken för att återkomma till aktuell vy