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- Braun, Stefan, et al.
(författare)
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Small footprint knife gate microvalves for large flow control
- 2005
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Ingår i: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005). - NEW YORK : IEEE conference proceedings. ; , s. 329-332
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Konferensbidrag (refereegranskat)abstract
- This paper introduces the first area-optimized micromachined knife gate microvalve. In comparison to recent microvalves the pressure-flow performance is increased using out-of-plane actuators and an out-of-plane orifice. Three different actuator-gate designs and their fabrication are described. The valve features integrated therinal silicon/aluminum bimorph actuators where the aluminum layer forins the resistive heater as well as the bimorph material. The characterization of the actuators and of the pressure-flow perfon-nance is presented. The valve allows a flow change of Delta Q=3.4 1/min at 100 kPa on an active chip area of only 2.3 x 3.7 mm(2).
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