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- Haasl, Sjoerd, et al.
(författare)
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Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows
- 2006
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Ingår i: Journal of microelectromechanical systems. - : IEEE Press. - 1057-7157 .- 1941-0158. ; 15:5, s. 1281-1288
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Tidskriftsartikel (refereegranskat)abstract
- This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of Delta Q = 3.4 standard liters per minute (SLPM) at a pressure change of Delta P = 95 kPa (P-in = 196.3 kPa, P-out = 101.3 kPa) on an active chip area of only 2.3 x 3.7 mm(2).
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