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- Edqvist, Erik, et al.
(författare)
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Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards
- 2009
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Ingår i: Journal of Micromechanics and Microengineering. - : Institute of Physics Publishing. - 0960-1317 .- 1361-6439. ; 19:7, s. 11pp-
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Tidskriftsartikel (refereegranskat)abstract
- Initial tests of a building technology for a compact three-dimensional mass produciblemicrorobot are presented. The 3.9 × 3.9 × 3.3 mm3 sized prototype robot represents amicrosystem with actuators, sensors, energy management and integrated electronics. Theweight of a folded robot is 65 mg and the total volume is less than 23 mm3. The design of theinterfaces of the different modules in the robot, as well as the building technology, isdescribed. The modules are assembled using conductive adhesive with industrial surfacemounting technology on a thin double-sided flexible printed circuit board. The final shape ofthe microrobots is achieved by folding the flexible printed circuit board twice. Electrical andmechanical studies are performed to evaluate the assembly and it is concluded that thetechnology can be used for this type of microsystem. Several issues using the presentedassembly technique are identified and addressed.
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- Edqvist, Erik, et al.
(författare)
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Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma
- 2008
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 18:1, s. 015007-
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Tidskriftsartikel (refereegranskat)abstract
- To fully utilize the actuator properties of poly(vinylidenefluoride) (P(VDF))-based polymers, the electric field has to be rather high and one way to accomplish this, in particular with low voltage drive signals, is to build multilayered structures. This paper focuses on how to structure poly(vinylidenefluoride-trifluoroethylene) P(VDF-TrFE) by presenting an etch method to create multilayered miniaturized actuators, with intermediate aluminium electrodes. To create inter-connect areas for the multilayer electrodes, a modified Bosch process in an inductive couple plasma (ICP) etcher is used to remove all P(VDF-TrFE) not covered by the electrodes. Since each electrode mask is slightly different from the others, the result is a staircase-like inter-electrode contact area that is connected from above using a conductive adhesive. The developed ICP etch results in high selective etching and a good agreement between theoretical and measured capacitance values. The manufactured cantilevers, consisting of a multilayer on top of a flexible printed circuit (FPC) board, were tested and the resonant stroke was confirmed to agree with expected values. The successful establishment of interlayer connections between the electrodes open up the possibility for batch fabrication of cheap low voltage micro actuators built on a standard substrate used in millions of commercial products. 2008 IOP Publishing Ltd.
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- Snis, Niklas, 1978-
(författare)
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Actuators for autonomous microrobots
- 2008
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- This thesis presents actuators used in autonomous microsystems. Characteristic for all actuators presented is the low drive voltage and the low power consumption. Different motion mechanisms have been studied and applied in various locomotion modules for microrobots. High resolution movement of a monolithic piezoceramic PZT rotational arm module, using a quasi-static motion mechanism, was demonstrated in a 10x10x20 mm3 autonomous robot. The rotational arm comprises multilayer PZT bimorphs and is fabricated by a wet-building technology. The multilayer approach enables operation of the modules at the low drive voltages provided by the robot electronics. In addition a locomotion module has been designed and fabricated based on the above principles. A three-legged locomotion module with piezoceramic unimorphs, moving by tapping the legs against the floor, has been investigated. Characteristics such as low power consumption, high velocities, low drive voltages and a high weight carrying capability were demonstrated using a resonant motion mechanism. Highly miniaturized three-legged locomotion modules were developed for a 3x3x3 mm3 autonomous microrobot. The modules comprise a multilayer structure of the electroactive copolymer P(VDF-TrFE) on a flexible printed circuit board (FPC) substrate. A novel multilayer fabrication process suitable for mass production was used. It is based on sequential deposition of spun cast copolymer with evaporated aluminum electrodes. Reactive ion etching is used to microstructure the copolymer and the FPC. The mechanical deformability of the FPC is exploited when folding the 2D FPC-multilayer assembly into 3D locomotion modules. Locomotion was demonstrated by moving a glass slider corresponding to the robot weight. A modular building technology for microsystems is presented. It uses surface mounting technology and conductive adhesives to assemble modules on a double-sided FPC. Complex geometries were achieved by subsequent folding the FPC. The feasibility of the technology was demonstrated by assembly of the 3x3x3 mm3 autonomous microrobots.
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