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| 2. |
- Arteaga, Natalia, et al.
(författare)
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The new cell irradiation facility at the Lund nuclear probe
- 2007
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 260:1, s. 91-96
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Tidskriftsartikel (refereegranskat)abstract
- The CELLION project is directed towards the studies on cellular response to targeted single ions. This paper gives an account of the modifications made at the Lund sub-micron beam line in order to create a Single Ion Hit Facility for biological applications within the CELLION project. The most relevant new feature is the specially developed software used to locate the cells. A program for cell recognition and localization that gives the coordinates of the centre of the cells has been designed. The recognition is made online. A picture taken by a microscope is used as input parameter for the recognition program. Using V79 Chinese hamster cells, the recognition procedure can be done in less than 0.5 s for a picture size of 800 x 600 pixels with approximately 96% efficiency. This paper also reports target accuracy test results and the first non-targeted irradiation procedure performed at the Lund sub-micron beam line. (c) 2007 Elsevier B.V. All rights reserved.
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| 3. |
- Auzelyte, Vaida, et al.
(författare)
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Exposure parameters for MeV proton beam writing on SU-8
- 2006
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Ingår i: Microelectronic Engineering. - : Elsevier BV. - 1873-5568 .- 0167-9317. ; 83:10, s. 2015-2020
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Tidskriftsartikel (refereegranskat)abstract
- Proton beam writing was performed on a lithographic resist to determine the main parameters required to achieve the minimum feature size, maximum pattern lateral density and maximum aspect ratio. A 2.5 MeV proton beam focused to sizes between 1.5 and 2.5 mu m was used to expose SU-8 negative resist. The number of protons per pixel was varied in the exposure of SU-8 with thicknesses between 5 and 95 pm. Patterns consisting of single pixels, single-pixel lines and multi-pixel areas with different densities were fabricated. The smallest structures achieved were posts 1.5 pin in diameter with 4:1 structure-space ratio in 15 pm thick resist and the highest aspect ratio structures of 20:1 in 40 pm resist were produced. It was found that the minimum feature size depended only on the beam size, and +/- 10% post size accuracy could be achieved within 40-70% variation of the number of protons. MeV proton beam allows a direct fabrication of complex shapes without a mask in single-step irradiation and. in addition, no proximity correction is needed. We present examples of MeV proton beam written single and multi-pixel microstructures with easily reproducible high aspect ratios and densities. (c) 2006 Elsevier B.V. All rights reserved.
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| 4. |
- Auzelyte, Vaida, et al.
(författare)
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Fabrication of phosphor micro-grids using proton beam lithography
- 2006
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 242:1-2, s. 253-256
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Tidskriftsartikel (refereegranskat)abstract
- A new nuclear microscopy technique called ion photon emission microscopy or IPEM was recently invented. IPEM allows analysis involving single ions, such as ion beam induced charge (IBIC) or single event upset (SEU) imaging using a slightly modified optical microscope. The spatial resolution of IPEM is currently limited to more than 10 mu m by the scattering and reflection of ion-induced photons, i.e. light blooming or spreading, in the ionoluminescent phosphor layer. We are developing a '' Microscopic Gridded Phosphor '' (also called Black Matrix) where the phosphor nanocrystals are confined within the gaps of a micrometer scale opaque grid, which limits the amount of detrimental light blooming. MeV-energy proton beam lithography is ideally suited to lithographically form masks for the grid because of high aspect ratio, pattern density and sub-micron resolution of this technique. In brief, the fabrication of the grids was made in the following manner: (1) a MeV proton beam focused to 1.5-2 mu m directly fabricated a matrix of pillars in a 15 mu m thick SU-8 lithographic resist; (2) 7:1 aspect ratio pillars were then formed by developing the proton exposed area; (3) Ni (Au) was electrochemically deposited onto Cu-coated Si from a sulfamate bath (or buffered CN bath); (4) the SU-8 pillars were removed by chemical etching; finally (5) the metal micro-grid was freed from its substrate by etching the underlying Cu layer. Our proposed metal micro-grids promise an order-of-magnitude improvement in the resolution of IPEM.
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| 5. |
- Auzelyte, Vaida, et al.
(författare)
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On-line measurement of proton beam current in pA range
- 2006
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 249, s. 760-763
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Tidskriftsartikel (refereegranskat)abstract
- A MeV proton beam with a current in the range of fA-nA is usually measured using a secondary beam signal that is dependent on a sample or requires noise-free accurate charge integration in a Faraday cup. We propose a simple on-line beam current measurement setup that can be used to directly measure beam current during ion beam analysis. A fast beam blanker is used to modulate the beam position after the last set of collimator slits in and out of a mini Faraday cup connected to fA-sensitive electrometer. Less than 100 fA current can be measured during an undisturbed irradiation with kHz sampling frequency. The fast, simple and easily controlled current measurement set-up is going to be routinely used for ion beam analysis and modification at the new Lund sub-micron beam line. (c) 2006 Elsevier B.V. All rights reserved.
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| 6. |
- Auzelyte, Vaida, et al.
(författare)
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The beam blanking system for microlithography at Lund Nuclear microprobe
- 2004
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 219-20, s. 485-489
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Tidskriftsartikel (refereegranskat)abstract
- A new beam blanking system was installed at the Lund Nuclear Microprobe and employed in proton beam lithography (PBL) for polymer microstructures fabrication. The blanker consists of two parallel plates connected to a high voltage generator. Measurement of the beam blanking time on a sample was performed by means of the standard PIXE system. The beam is blanked and returns to a sample within 200 ns. The blanking system is designed for the new sub-micrometer beamline under installation in the accelerator laboratory. A number of pilot MeV ion beam lithography experiments were performed to illustrate the possibility to use the blanking system in combination with the existing data acquisition and scanning system. A 2.5 MeV proton beam was used to irradiate 50 mum SU-8 negative resist. The blanker was shown to be a necessary part of the lithography system. It enables blanking between each pixel and hence fabrication of various patterns down to a single pixel. The blanker has significantly simplified beam control and enhanced process time and spatial resolution. Three-dimensional microstructures with 20:1 aspect ratio were fabricated.
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| 7. |
- Elfman, Mikael, et al.
(författare)
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The Lund Nuclear Microprobe sub-micron set-up. Part III: Sample stage, optical imaging and detector configuration in the experimental chamber
- 2005
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 231:1-4, s. 14-20
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Tidskriftsartikel (refereegranskat)abstract
- A new sub-micron beamline for high-resolution nuclear microprobe applications has been constructed at the Lund nuclear microprobe facility. The design and construction of the main experimental chamber.. sample viewing system and computer controlled precision sample stage movement is presented in this paper. The chamber is especially designed for using a large area annular HPGe detector. The advantages with such a large area detector are discussed and illustrated. In addition the quality of the optical viewing and the precision sample stage is discussed.
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| 8. |
- Golubev, Pavel, et al.
(författare)
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First results from the Lund NMP particle detector system
- 2009
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Ingår i: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 267:12-13, s. 2065-2068
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Konferensbidrag (refereegranskat)abstract
- The design and first results from a Double Sided Silicon Strip Detector (DSSSD) recently installed at the Lund Nuclear Microprobe facility (NMP) are presented. The detector has 64 sector strips and 32 ring strips, which in combination give more than 2000 detector cells, each with characteristics comparable with a standard surface barrier detector (SBD). The detector has been tested both with radioactive sources and with different ion beams and energies. The most striking features are the high rate virtually pile-up free operation and also the possibility of detailed measurement of angular distributions. (C) 2009 Elsevier B.V. All rights reserved.
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| 9. |
- Kristiansson, Per, et al.
(författare)
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Development of a system for determination of the C-13/C-12 isotopic ratio with high spatial resolution
- 2004
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - : Elsevier BV. - 0168-583X. ; 219-20, s. 561-566
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Tidskriftsartikel (refereegranskat)abstract
- Stable carbon isotopes play an important role in the interpretation of biological activity, particularly when the fossil record is studied. In combination with morphological and chemical data, isotopic information can be useful in paleontology and astrobiology. In this paper the development of a microanalytical ion beam system for the measurement of the carbon isotope ratio with high spatial resolution and good statistics is presented. The technique used is elastic scattering of alpha particles with an energy of 2.75 MeV. At this energy the C-13 cross-section is enhanced relative to the Rutherford cross-section and while the C-12 cross-section is reduced. The optimisation of the system is described, including sample preparation and the design of the particle detection system for high efficiency combined with good energy resolution. Finally, some results from the initial test run of the system are shown and discussed. (C) 2004 Elsevier B.V. All rights reserved.
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| 10. |
- Nilsson, Charlotta, et al.
(författare)
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Characterisation of a pre-cell hit detector to be used in single cell irradiation experiments at the Lund Nuclear Microprobe
- 2008
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - Amsterdam : Elsevier BV. - 0168-583X .- 1872-9584. ; 266:21, s. 4808-4815
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Tidskriftsartikel (refereegranskat)abstract
- This paper describes the characterisation of an ultra-thin silicon semicondoctor Delta E detector to be used as a pre-cell ion hit detector in single ion experiments on individual, living cells. The characteristics of interest for this specific application are the hit detection efficiency, which has to be close to 100% to enable bombardment with either a single ion or a counted number of ions, the beam spreading, which should be as small as possible to maintain the targeting accuracy, and the vacuum tightness, since the detector is intended, if possible, to be used simultaneously as vacuum window. The hit detection efficiency was shown to be above 99% when detecting alpha particles or 2 MeV protons, the increase in beam size was about 1 mu m and the vacuum tightness was comparable to that of the Si3N4 wafer which is normally used as vacuum window, thus the Delta E detector fulfils the main criteria to function properly as a single ion hit detector. (C) 2008 Elsevier B.V. All rights reserved.
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