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- Qin, Changliang, et al.
(författare)
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Process optimizations to recessed e-SiGe source/drain for performance enhancement in 22 nm all-last high-k/metal-gate pMOSFETs
- 2016
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Ingår i: Solid-State Electronics. - : Elsevier. - 0038-1101 .- 1879-2405. ; 123, s. 38-43
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Tidskriftsartikel (refereegranskat)abstract
- In this paper, the technology of recessed embedded SiGe (e-SiGe) source/drain (S/D) module is optimized for the performance enhancement in 22 nm all-last high-k/metal-gate (HK/MG) pMOSFETs. Different Si recess-etch techniques were applied in S/D regions to increase the strain in the channel and subsequently, improve the performance of transistors. A new recess-etch method consists of a two-step etch method is proposed. This process is an initial anisotropic etch for the formation of shallow trench followed by a final isotropic etch. By introducing the definition of the upper edge distance (D) between the recessed S/D region and the channel region, the process advantage of the new approach is clearly presented. It decreases the value of D than those by conventional one-step isotropic or anisotropic etch of Si. Therefore, the series resistance is reduced and the channel strain is increased, which confirmed by the simulation results. The physical reason of D reducing is analyzed in brief. Applying this recess design, the implant conditions for S/D extension (SDE) are also optimized by using a two-step implantation of BF2 in SiGe layers. The overlap space between doping junction and channel region has great effect on the device's performance. The designed implantation profile decreases the overlap space while keeps a shallow junction depth for a controllable short channel effect. The channel resistance as well as the transfer ID-VG curves varying with different process conditions are demonstrated. It shows the drive current of the device with the optimized SDE implant condition and Si recess-etch process is obviously improved. The change trend of on-off current distributions extracted from a series of devices confirmed the conclusions. This study provides a useful guideline for developing high performance strained PMOS SiGe technology.
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- Shen, Zhijian, et al.
(författare)
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Fractography of self-glazed zirconia with improved reliability
- 2017
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Ingår i: Journal of the European Ceramic Society. - : Elsevier BV. - 0955-2219 .- 1873-619X. ; 37:14, s. 4339-4345
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Tidskriftsartikel (refereegranskat)abstract
- The fractography of a new grade of zirconia ceramics, known as self-glazed zirconia, was investigated. The as-sintered intact top surface was made with superior smoothness that mimicked the optical appearances of the natural teeth enamel. The beneath surface opposite to this was made hierarchically rough with microscopic pits of the size up to 60. μm together with grain-level roughness of about 2. μm. The three-point bending test of the samples made with the hierarchically rough surface being tensile one demonstrated an average bending strength of 1120. ±. 70. MPa and a Weibull modulus of as high as 18 ascribed to the improved structural homogeneity. Surface topography was found the main origins of crack initiation leading to fracture. The observed unusually predominant transgranular fracture mode of submicron-sized grains disclosed a possible toughening mechanism of disassembling of mesocrystalline grains that differs significantly from the commonly quoted phase transformation toughening of this category of ceramics.
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| 5. |
- Yen, Jonathan, et al.
(författare)
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Authenticatable graphical bar codes
- 2000
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Patent (populärvet., debatt m.m.)abstract
- Systems and methods for generating and decoding authenticatable graphical bar codes are described. In one aspect, a corroborative signed message is generated from information to be encoded, and a base image is modulated with a graphical encoding of the signed message to produce a marked image. In another aspect, a signed message is extracted from a marked image based upon a comparison of the marked image and a base image. The extracted signed message is decoded to produce a decoded message. Information encoded in the marked image is extracted from the decoded message and authenticated.
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| 6. |
- Yen, Jonathan, et al.
(författare)
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Method of encoding a handwritten signature
- 2000
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Patent (populärvet., debatt m.m.)abstract
- Systems and methods for generating and decoding authenticatable graphical bar codes are described. In one aspect, a corroborative signed message is generated from information (12) to be encoded, and a base image (22) is modulated with a graphical encoding of the signed message to produce a marked image (14). In another aspect, a signed message is extracted from a marked image (14) and a base image (22). The extracted signed message is decoded to produce a decoded message. Information (12) encoded in the marked image (14) is extracted from the decoded message and authenticated.
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