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- Tian, Jie, et al.
(författare)
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Optical Quality Improvement of Si Photonic Devices Fabricated by Focused-Ion-Beam Milling
- 2009
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Ingår i: Journal of Lightwave Technology. - 0733-8724 .- 1558-2213. ; 27:19, s. 4306-4310
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Tidskriftsartikel (refereegranskat)abstract
- Focused-ion-beam directly milling strategy was used to fabricate photonic resonators on crystalline silicon-on-insulator substrate. In order to reduce damages such as implanting ions, amorphous layers and re-deposition process which are induced by the ions, a sacrificed silica layer was used as an etching mask and a silicon thermal oxidation process was performed. The transmission spectra of both photonic crystal cavities and micro-ring resonators were measured. The resulting data demonstrate that the Q factors are significantly improved after the oxidation treatment.
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