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- Ahvenniemi, Esko, et al.
(författare)
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Recommended reading list of early publications on atomic layer deposition-Outcome of the "Virtual Project on the History of ALD"
- 2017
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 35:1
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Forskningsöversikt (refereegranskat)abstract
- Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and developed independently, at least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating back to 1974 in Finland, has been commonly known as the origin of ALD, while work done since the 1960s in the Soviet Union under the name "molecular layering" (and sometimes other names) has remained much less known. The virtual project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of ALD more transparent. In VPHA, started in July 2013, the target is to list, read and comment on all early ALD academic and patent literature up to 1986. VPHA has resulted in two essays and several presentations at international conferences. This paper, based on a poster presentation at the 16th International Conference on Atomic Layer Deposition in Dublin, Ireland, 2016, presents a recommended reading list of early ALD publications, created collectively by the VPHA participants through voting. The list contains 22 publications from Finland, Japan, Soviet Union, United Kingdom, and United States. Up to now, a balanced overview regarding the early history of ALD has been missing; the current list is an attempt to remedy this deficiency.
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| 2. |
- Sitnov, Mikhail, et al.
(författare)
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Explosive Magnetotail Activity
- 2019
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Ingår i: Space Science Reviews. - : Springer. - 0038-6308 .- 1572-9672. ; 215:4
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Forskningsöversikt (refereegranskat)abstract
- Modes and manifestations of the explosive activity in the Earth's magnetotail, as well as its onset mechanisms and key pre-onset conditions are reviewed. Two mechanisms for the generation of the pre-onset current sheet are discussed, namely magnetic flux addition to the tail lobes, or other high-latitude perturbations, and magnetic flux evacuation from the near-Earth tail associated with dayside reconnection. Reconnection onset may require stretching and thinning of the sheet down to electron scales. It may also start in thicker sheets in regions with a tailward gradient of the equatorial magnetic field Bz; in this case it begins as an ideal-MHD instability followed by the generation of bursty bulk flows and dipolarization fronts. Indeed, remote sensing and global MHD modeling show the formation of tail regions with increased Bz, prone to magnetic reconnection, ballooning/interchange and flapping instabilities. While interchange instability may also develop in such thicker sheets, it may grow more slowly compared to tearing and cause secondary reconnection locally in the dawn-dusk direction. Post-onset transients include bursty flows and dipolarization fronts, micro-instabilities of lower-hybrid-drift and whistler waves, as well as damped global flux tube oscillations in the near-Earth region. They convert the stretched tail magnetic field energy into bulk plasma acceleration and collisionless heating, excitation of a broad spectrum of plasma waves, and collisional dissipation in the ionosphere. Collisionless heating involves ion reflection from fronts, Fermi, betatron as well as other, non-adiabatic, mechanisms. Ionospheric manifestations of some of these magnetotail phenomena are discussed. Explosive plasma phenomena observed in the laboratory, the solar corona and solar wind are also discussed.
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