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| 2. |
- Forsberg, Fredrik, et al.
(författare)
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CMOS-integrated Si/SiGe quantum-well infrared microbolometer focal plane arrays manufactured with very large-scale heterogeneous 3-d integration
- 2015
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Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - : Institute of Electrical and Electronics Engineers Inc.. - 0792-1233 .- 1077-260X .- 1558-4542. ; 21:4
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate infrared focal plane arrays utilizing monocrystalline silicon/silicon-germanium (Si/SiGe) quantum-well microbolometers that are heterogeneously integrated on top of CMOS-based electronic read-out integrated circuit substrates. The microbolometers are designed to detect light in the long wavelength infrared (LWIR) range from 8 to 14 μm and are arranged in focal plane arrays consisting of 384 × 288 microbolometer pixels with a pixel pitch of 25 μm × 25 μm. Focal plane arrays with two different microbolometer designs have been implemented. The first is a conventional single-layer microbolometer design and the second is an umbrella design in which the microbolometer legs are placed underneath the microbolometer membrane to achieve an improved pixel fill-factor. The infrared focal plane arrays are vacuum packaged using a CMOS compatible wafer bonding and sealing process. The demonstrated heterogeneous 3-D integration and packaging processes are implemented at wafer-level and enable independent optimization of the CMOS-based integrated circuits and the microbolometer materials. All manufacturing is done using standard semiconductor and MEMS processes, thus offering a generic approach for integrating CMOS-electronics with complex miniaturized transducer elements
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| 3. |
- Last, Torben, et al.
(författare)
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Micro Swirl-Nozzle Enables Portable Delivery ofLarge-Molecule Biopharmaceuticals to the Lung
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Annan publikation (övrigt vetenskapligt/konstnärligt)abstract
- Large-molecule pharmaceuticals offer new treatment options for severe lung disease. However, delivering these drugs to the lung is challenging due to the elevated shear rates during the aerosolization process. So far, this has prevented an application in portable inhalers, holding back the portable use of biopharmaceuticals for drug delivery. We demonstrate that a micro swirl nozzle can aerosolize fragile biopharmaceuticals in an aqueous solution. Shear rate simulations of the nozzle unit indicate orders of magnitude in shear rate reduction compared with conventional aqueous aerosolization units. Catalase protein can survive the aerosolization process at up to 50 bar without significant degradation. The protein further remains enzymatically active after the spray event.Using an in-vitro model, we present the delivery of more complex and fragile mRNA structures (Nanoluc mRNA) at high concentrations when encapsulated in solid lipid nanoparticles (LNPs) or Extracellular vesicles (EVs). These vesicles maintain their capability to pass the cell wall in in-vitro cell cultures, leading to an expression of the encapsulated protein structure within the celll. Micro swirl nozzles can enable the portable delivery of large molecule pharmaceuticals and bring new treatment options to patients who have so far had to rely on stationary devices.
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| 5. |
- Ribet, Federico, et al.
(författare)
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Ultra-miniaturization of a planar amperometric sensor targeting continuous intradermal glucose monitoring
- 2017
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Ingår i: Biosensors & bioelectronics. - : Elsevier. - 0956-5663 .- 1873-4235. ; 90, s. 577-583
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Tidskriftsartikel (refereegranskat)abstract
- An ultra-miniaturized electrochemical biosensor for continuous glucose monitoring (CGM) is presented. The aim of this work is to demonstrate the possibility of an overall reduction in sensor size to allow minimally invasive glucose monitoring in the interstitial fluid in the dermal region, in contrast to larger state-of-the-art systems, which are necessarily placed in the subcutaneous layer. Moreover, the reduction in size might be a key factor to improve the stability and reliability of transdermal sensors, due to the reduction of the detrimental foreign body reaction and of consequent potential failures. These advantages are combined with lower invasiveness and discomfort for patients. The realized device consists of a microfabricated three-electrode enzymatic sensor with a total surface area of the sensing portion of less than 0.04 mm2, making it the smallest fully integrated planar amperometric glucose sensor area reported to date. The working electrode and counter electrode consist of platinum and are functionalized by drop casting of three polymeric membranes. The on-chip iridium oxide (IrOx) pseudo-reference electrode provides the required stability for measurements under physiological conditions. The device is able to dynamically and linearly measure glucose concentrations in-vitro over the relevant physiological range, while showing sufficient selectivity to known interfering species present in the interstitial fluid, with resolution and sensitivity (1.51 nA/mM) comparable to that of state-of-art commercial CGM systems. This work can therefore enable less invasive and improved CGM in patients affected by diabetes.
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| 6. |
- Tian, Xu, et al.
(författare)
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Low-Temperature Integration of Bulk PZT-5H for Enhancing the Performance of MEMS-Based Piezoelectric Ultrasonic Energy Harvesters
- 2024
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Ingår i: IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. - : Institute of Electrical and Electronics Engineers (IEEE). ; , s. 749-752
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Konferensbidrag (refereegranskat)abstract
- We demonstrate a low-temperature fabricated MEMS-based piezoelectric ultrasonic energy harvester with enhanced device performance. Compared to state-of-the-art, our work uses a low-temperature bonding method, which ensures the integrated piezoelectric material undergoes prominently lower temperatures (≤ 85 °C) throughout the whole fabrication process. Due to this, bulk PZT-5H, a material with superior piezoelectric properties, could be used in this type of application for the first time. The method guarantees the device fabrication temperature well below the PZT-5H Curie temperature (225 °C) and preserves its piezoelectricity to the greatest extent. As a result, devices fabricated using the proposed method achieve higher performance than the devices prepared by the MEMS fabrication method using BCB bonding. The root-mean-square voltage and the average power outputs at the frequency (170 kHz) where maximum voltage and power outputs were observed were improved by 38 % and 92 %, respectively.
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