| 1. |
- Barankova, Hana, et al.
(författare)
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Magnetized hollow cathode activated magnetron
- 2015
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 107:15
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Tidskriftsartikel (refereegranskat)abstract
- Planar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
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| 2. |
- Baránková, Hana, et al.
(författare)
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Non-Conventional Atmospheric Pressure Plasma Sources for Production of Hydrogen
- 2018
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Ingår i: MRS Advances. - : Cambridge University Press. - 2059-8521. ; 3:18, s. 921-929
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Tidskriftsartikel (refereegranskat)abstract
- The atmospheric pressure plasma sources with a coaxial geometry were used for generation of the radio frequency, microwave and pulsed dc plasmas inside water and aqueous solutions. Pulsed dc plasma generated in ethanol-water mixtures leads to production of the hydrogen-rich synthesis gas with hydrogen content up to 65 % The effect of various plasma generation regimes on the performance of plasma, on the hydrogen production efficiency and on the hydrogen-rich synthesis gas production was examined. A role of the composition of the ethanol-water mixture was investigated.
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| 3. |
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| 4. |
- Barankova, Hana, et al.
(författare)
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Reactive Deposition of TiN Films by Magnetron with Magnetized Hollow Cathode Enhanced Target
- 2018
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Ingår i: Vacuum. - : Elsevier BV. - 0042-207X .- 1879-2715. ; 152, s. 123-127
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Tidskriftsartikel (refereegranskat)abstract
- Magnetized Hollow Cathode Activated Magnetron in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron was tested in the reactive process of TiN deposition. Increased deposition rate compared to the Ti metal deposition rate was confirmed. The depositions as well as optical measurements were performed at several pressures in the reactor. The results of the TiN reactive deposition are presented and discussed, including the TiN deposition in pure nitrogen.
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| 5. |
- Bardos, Ladislav, et al.
(författare)
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Production of Hydrogen-Rich Synthesis Gas by Pulsed Atmospheric Plasma Submerged in Mixture of Water with Ethanol
- 2017
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Ingår i: Plasma chemistry and plasma processing. - : Springer Science and Business Media LLC. - 0272-4324 .- 1572-8986. ; 37:1, s. 115-123
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Tidskriftsartikel (refereegranskat)abstract
- Hydrogen-rich synthesis gas was produced by pulsed dc plasma submerged into ethanol-water mixtures using an original system with a coaxial geometry. The ignition of the discharge is immediately followed by production of hydrogen and after a short time necessary for filling the outlet tubing a flame can be ignited. No auxiliary gas was used for the reforming process. The synthesis gas containing up to 60% of hydrogen was formed, at the outflow rate of 250 sccm at the average power as low as 10 W. The hydrogen production efficiency corresponds to 12 kWh/kg H-2.
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| 6. |
- Barankova, Hana, et al.
(författare)
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Abnormal High Rate Deposition of TiN Films by the Radio Frequency Plasma Jet System
- 1995
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Ingår i: J Electrochem Soc. - 0013-4651. ; 142:3, s. 883-887
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Tidskriftsartikel (refereegranskat)abstract
- Radio frequency Ar and Ar + N-2 plasma jets generated in a hollow electrode terminated by a small size Ti nozzle were used for deposition of Ti and TiN films. The regime with low content of reactive gas resulted in an extreme enhancement of TiN deposition
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| 7. |
- Barankova, Hana, et al.
(författare)
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Amorphous Carbon Coatings on Glass for High Voltage Protection
- 2022
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Ingår i: ECS Journal of Solid State Science and Technology. - : The Electrochemical Society. - 2162-8769 .- 2162-8777. ; 11:5
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Tidskriftsartikel (refereegranskat)abstract
- Radio frequency Hollow Cathode based hybrid process integrating both Physical Vapor Deposition and Plasma Enhanced Chemical Vapor Deposition was used for deposition of amorphous carbon on glass samples. The films were subjected to high voltage pulses and the performance was compared with uncoated glass samples to test the protection ability of the films, the ability to prevent the deteriorating effects of corona flashovers/arcs. In contrast to the uncoated glass the well adherent carbon films with thicknesses between 3.5 and 17 mu m exhibited an excellent protection of the glass substrate against the flashovers/arc damages in both polarities of the electric field with voltages up to 300 kV.
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| 8. |
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| 9. |
- Barankova, Hana, et al.
(författare)
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Atmospheric Plasma Technology for Coating
- 2007
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Ingår i: 50 Years of Vacuum Coating Technology and the Growth of the Society of Vacuum Coaters. - : Society of Vacuum Coaters, Albuquerque, NM. - 9781878068279 ; , s. 141-146
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Bokkapitel (övrigt vetenskapligt/konstnärligt)
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| 10. |
- Baránková, Hana, et al.
(författare)
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Atmospheric pressure plasma conversion of CO2 to solid deposits
- 2015
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Ingår i: Results in Physics. - Elsevier : Elsevier BV. - 2211-3797. ; 5, s. 257-258
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Tidskriftsartikel (refereegranskat)abstract
- Fused Hollow Cathode (FHC) with aerodynamic stabilization was used for the gas conversion processes. During the conversion of NO into NO2 in air mixtures, the CO2 reduction occurs, without forming gaseous CO. In these processes brownish glassy solid deposits are formed in the plasma region. The deposits were analyzed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffraction.
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| 11. |
- Baránková, Hana, et al.
(författare)
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Atmospheric Pressure Plasma Sources and Processing
- 2009. - 3
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Ingår i: Handbook of Deposition Technologies for Films and Coatings. - Oxford : Elsevier, William Andrew. - 9780815520313 ; , s. 865-880
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Bokkapitel (populärvet., debatt m.m.)
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| 12. |
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| 13. |
- Barankova, Hana, et al.
(författare)
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Characterization of the linear arc discharge (LAD) source for film deposition
- 1997
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Ingår i: SURFACE & COATINGS TECHNOLOGY. - 0257-8972. ; 94-5:1-3, s. 578-582
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Tidskriftsartikel (refereegranskat)abstract
- The linear arc discharge (LAD) source is a parallel plate hollow cathode with a magnetic field perpendicular to the plates near the outlet slit of the cathode. The hollers cathode discharge is generated by radio frequency (rf) power and is confined mainly
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| 14. |
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| 15. |
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| 16. |
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| 17. |
- Baránková, Hana, et al.
(författare)
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Cold Atmospheric Plasma in Nitrogen and Air Generated by the Hybrid Plasma Source
- 2006
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 24:4, s. 1410-1413
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Tidskriftsartikel (refereegranskat)abstract
- Generation of long plumes of cold atmospheric plasma in nitrogen and air has been successfully performed by the hybrid hollow electrode activated discharge (H-HEAD) source. The source with a simple cylindrical electrode terminated by a gas nozzle combines the microwave antenna plasma with the hollow cathode plasma generated inside the gas nozzle by pulsed dc power. The H-HEAD source is capable of generating up to 10 cm long plumes in air at microwave powers below 500 W and at air flow rates as low as 100 sccm (standard cubic centimeter per minute). The corresponding flow rates in the nitrogen plasma are even less than 80 sccm. The discharges in air and nitrogen have similar shapes and are comparable with the corresponding plasma columns in argon. A comparison of the optical emission spectra of the plasma in nitrogen and air is presented. The temperatures generated on steel substrates by interaction with nitrogen and air plasma columns at different microwaves and dc powers are compared with the corresponding effects in argon plasma.
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| 18. |
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| 19. |
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| 20. |
- Barankova, Hana, et al.
(författare)
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Cold atmospheric plasma sources
- 2002
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Ingår i: INVITED PAPER, ANZIO 2002, 5th Symp.Europ.Vac.Coaters, September 30, Rome-Anzio, Italy, abstract only.
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Konferensbidrag (refereegranskat)
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| 21. |
- Barankova, Hana, et al.
(författare)
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Cold atmospheric plasma sources based on hollow cathodes
- 2002
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Ingår i: INVITED presentation at 1st Topical Meeting on Pulsed and Atmospheric Pressure Plasma Processing, FMT - Forschungszentrum für Mikrostrukturtechnik, Univestity of Wuppertal, Wuppertal, March 2002.
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Konferensbidrag (refereegranskat)
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| 22. |
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| 23. |
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| 24. |
- Barankova, Hana, et al.
(författare)
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Comparison of pulsed dc and rf hollow cathode depositions of Cr and CrN films
- 2011
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Ingår i: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 205:17-18, s. 4169-4176
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Tidskriftsartikel (refereegranskat)abstract
- A cylindrical chromium hollow cathode powered by a pulsed dc generator working in a constant power mode was used for PVD of chromium and chromium nitride films on silicon substrates in argon and nitrogen plasmas, respectively. A comparison of the pulsed dc process with the radio frequency hollow cathode depositions of Cr and CrN films at identical power levels shows considerable differences particularly in the deposition rate of Cr films. At the pulsed power above 250 W the hot cathode/diffuse arc regimes were reached with the cathode outlet temperature as high as 1300 degrees C and the maximum deposition rates of both Cr and CrN films exceeded 1 mu m/min. The resulting film properties, e.g. the microstructure and morphology were studied and compared with the films obtained by the rf hollow cathode PVD.
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| 25. |
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| 26. |
- Baránková, Hana, et al.
(författare)
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Conversion of Nitrogen and Carbon Oxides by the Atmospheric Hollow Cathode Discharges
- 2012
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Ingår i: IEEE Transactions on Plasma Science. - 0093-3813 .- 1939-9375. ; 40:5, s. 1324-1328
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Tidskriftsartikel (refereegranskat)abstract
- We have successfully tested the fused hollow cathode with aerodynamic stabilization as a 100% oxidation catalyst in conversion of NOx in air mixtures. Plasma chemical kinetics and the processing window width are controlled by plasma characteristics. Results show that, besides the plasma source design itself, the material of the electrodes plays a crucial role. It was found that, by using graphite electrodes, a 100% removal of NO from the air mixtures is possible without necessity of adding hydrocarbons. This paper presents results of oxygen screening, discusses the mechanisms of the process, and reports also on the CO2 reduction in some discharge regimes.
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| 27. |
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| 28. |
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| 29. |
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| 30. |
- Baránková, Hana, et al.
(författare)
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DLC coatings prepared by hollow cathodes at moderate pressure
- 2015
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- DLC coatings were prepared using the rf powered cylindrical and linear hollow cathodes. The deposition process is hybrid, combining both the PE CVD and PVD. A cylindrical graphite nozzle and graphite plates were used as targets. The gas mixture used in the deposition process was argon with acetylene. Compared to e.g. magnetron sputtering, the optimum content of acetylene is lower. The effect of the acetylene content in the gas mixture as well as rf power on the deposition rate and properties of the coatings are evaluated. The geometrical effect is studied, the cylindrical hollow cathode and the linear hollow cathode are compared and the transfer of the optimized process from the cylindrical into the linear hollow cathode is discussed.
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| 31. |
- Barankova, Hana, et al.
(författare)
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Effect of gas and cathode material on the r.f. hollow cathode reactive PVD
- 1999
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Ingår i: SURFACE & COATINGS TECHNOLOGY. - 0257-8972. ; 121, s. 704-708
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Tidskriftsartikel (refereegranskat)abstract
- The process of generation of the radio frequency (r.f.) hollow cathode discharge was examined for different gases and different materials of the r.f. electrode. The delivered r.f. power range used in the experiments enabled analysis of the hollow cathode
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| 32. |
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| 33. |
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| 34. |
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| 35. |
- Baránková, Hana, et al.
(författare)
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Effect of the electrode material on the atmospheric plasma conversion of NO in air mixtures
- 2010
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Ingår i: Vacuum. - : Elsevier BV. - 0042-207X .- 1879-2715. ; 84:12, s. 1385-1388
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Tidskriftsartikel (refereegranskat)abstract
- Non-thermal atmospheric pressure plasma is widely used for conversion of hazardous gases. Results from different laboratories confirm importance of energy non-equilibrium in the plasma where dominant energy carriers are electrons and a dominant chemistry is based on formation and interactions of radicals. Because of rather high electric fields required for generation and sustaining of air discharges at atmospheric pressure many plasma systems were found rather to create a lot of NO instead of removing it. A widely supported way to clean NO and NO2 from air mixtures is a plasma assisted catalytic reduction where the cold plasma is combined with the solid-state catalyst. In an ideal case the plasma acts as an oxidation catalyst where an atomic oxygen from air oxidizes NO to NO2 and the solid-state catalysts are then capable to convert all NO2 to N-2 and O-2. In most cases it is also necessary to involve auxiliary gases, e.g., propylene, to make the process efficient enough. This work introduces an original cold plasma system based on atmospheric hollow cathodes generated by a nanopulse DC power with controllable voltage and pulse frequency. The system was optimized in both the geometry and the applied power. However, the material of electrodes was found to be the most important factor affecting the plasma performance and consequently the chemical kinetics. A 100% conversion of NO to NO2 was achieved with a graphite electrode, without using any auxiliary gas and without catalyst. Plasma performance and conversion efficiency are compared for several electrode materials.
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| 36. |
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| 37. |
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| 38. |
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| 39. |
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| 40. |
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| 41. |
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| 42. |
- Barankova, Hana, et al.
(författare)
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High Density Plasma PVD of CrN Films
- 2004
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Ingår i: 6th Symp European Vacuum Coaters, September 2004, Rome-Anzio, Italy. ; , s. Invited paper-
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)
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| 43. |
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| 44. |
- Baránková, Hana, et al.
(författare)
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Hollow cathode and hybrid atmospheric plasma sources
- 2008
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Ingår i: Pure and Applied Chemistry. - : Walter de Gruyter GmbH. - 0033-4545 .- 1365-3075. ; 80:9, s. 1931-1937
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Tidskriftsartikel (refereegranskat)abstract
- Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.
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| 45. |
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| 46. |
- Barankova, Hana, et al.
(författare)
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Hollow Cathode and Hybride Plasma Processing
- 2005
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Ingår i: Proc of the 8th Int Symp on Sputtering & Plasma Processes (ISSP 2005), Kanazawa, Japan, June, PP1-3. ; , s. p. 234-238
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)
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| 47. |
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| 48. |
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| 49. |
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| 50. |
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