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- Zhang, A. P., et al.
(författare)
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Double-layer fabrication scheme for large-area polymeric photonic crystal membrane on silicon surface by multibeam interference lithography
- 2008
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Ingår i: Optics Letters. - 0146-9592 .- 1539-4794. ; 33:12, s. 1303-1305
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Tidskriftsartikel (refereegranskat)abstract
- We report on the fabrication of two-dimensional polymeric photonic crystal membranes on the surface of silicon using visible-light multibeam interference lithography. The structures are created by the interference of three beams of a green laser. A polymer buffer layer doped with a Rhodamine B laser dye, interlaid between the lithography layer and the silicon substrate, suppresses the effects of strong reflection and nonradiative absorption of silicon on the interference pattern. Large-area defect-free photonic crystal membranes are experimentally realized on silicon surface.
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