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- Gunnarsson, Robert, 1972, et al.
(författare)
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Fabrication and characterisation of La0.67Sr0.33MnO3 submicron grain boundary junctions
- 2004
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Ingår i: Annalen der Physik (Leipzig). ; 13:1-2, s. 101-102
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Konferensbidrag (refereegranskat)abstract
- We have successfully fabricated LSMO grain boundary bicrystaljunctions with widths down to 200 nm. The grain boundaries aresymmetric with misorientation angles of 24degrees or 36.8degrees, and the microbridges are positioned across thosewith a precision better than 0.5 micro-meter. Grain boundary magnetoresistance is observed in the wider junctions but not in the most narrow junction.
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| 5. |
- Malisa, Anayesu, 1965, et al.
(författare)
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Magnesium diboride nanobridges fabricated by electron-beam lithography
- 2005
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 98:12, s. 1-5
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Tidskriftsartikel (refereegranskat)abstract
- MgB2 nanobridges were fabricated by e-beam lithography and Ar-ion beam milling. Nanobridges of widths ranging from 60 nm to 1 μm and 3 μm in length were realized by Ar-ion beam milling using amorphous carbon as etching mask. The processing did not harm the superconducting properties appreciably. High values of the critical current density, more than 10 MA cm2, were measured for bridges with widths down to 60 nm. Current-voltage (I-V) characteristics showed a behavior typical of a bridge going normal, after the critical current is exceeded, and remaining normal as the current is decreased to a lower switch back value due to Joule heating. We could also observe switching behavior in some bridges indicating formation of normal hotspots in the bridges before they returned to their superconducting state. Alternative explanations may include natural grain boundaries in the film or the movement of Abrikosov vortices. The current-voltage (I-V) characteristics showing critical current densities up to 5× 107 A/cm2 indicates excellent film properties in the nanobridges.
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| 6. |
- Ramzi, Abelaziz, et al.
(författare)
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Niobium and Aluminum Josephson Junctions Fabricated with a Damascene CMP Process
- 2012
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Ingår i: Physics Procedia. - : Elsevier BV. - 1875-3884 .- 1875-3892. ; 36, s. 211-216
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Konferensbidrag (refereegranskat)abstract
- We report on the fabrication of Josephson junction and superconducting bridges using a damascene CMP process applied for a first time to superconductors. The demonstrated industrial reliability of damascene CMP processes on large scale semiconductor circuits is a major incentive for our research that should allow large numbers of nanometric Josephson junctions to be fabricated in both Nb and Al, the two main material employed in superconducting quantum computing (qubit) and RSFQ electronics fabrication.We carried out a Chemical-Mechanical Polishing (CMP) process on Nb and Al films deposited on a SiO2 layer patterned with trenches of 100 to 300 nm of nominal depth. The process formed long bridges, 1 to 4 μm wide. The susceptibility and resistive transitions showed that CMP has no observable influence on superconductivity.We have also developed a hybrid technique that uses Al/Al2O3/Al shadow evaporation in the trenches before the damascene CMP process. This allows for high quality “in-situ” junction oxidation with the size reduction benefit provided by the damascene CMP process. We easily reach junctions sizes near 0.5 μm2 which are difficult to fabricate by other methods.We describe these techniques and report on measurements on large bridges and junctions and on the fabrication and measurements of Al and Nb nanobridges.
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