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| 2. |
- Cardinali, G., et al.
(författare)
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Low-Threshold AlGaN-based UVB VCSELs enabled by post-growth cavity detuning
- 2022
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 121:10
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Tidskriftsartikel (refereegranskat)abstract
- The performance of vertical-cavity surface-emitting lasers (VCSELs) is strongly dependent on the spectral detuning between the gain peak and the resonance wavelength. Here, we use angle-resolved photoluminescence spectroscopy to investigate the emission properties of AlGaN-based VCSELs emitting in the ultraviolet-B spectral range with different detuning between the photoluminescence peak of the quantum-wells and the resonance wavelength. Accurate setting of the cavity length, and thereby the resonance wavelength, is accomplished by using doping-selective electrochemical etching of AlGaN sacrificial layers for substrate removal combined with deposition of dielectric spacer layers. By matching the resonance wavelength to the quantum-wells photoluminescence peak, a threshold power density of 0.4 MW/cm2 was achieved, and this was possible only for smooth etched surfaces with a root mean square roughness below 2 nm. These results demonstrate the importance of accurate cavity length control and surface smoothness to achieve low-Threshold AlGaN-based ultraviolet VCSELs.
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| 4. |
- Haglund, Åsa, 1976, et al.
(författare)
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Are blue and ultraviolet VCSELs a reality or just a dream?
- 2020
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- Blue-emitting vertical-cavity surface-emitting lasers (VCSELs) with high optical output powers and decent threshold current densities have recently been demonstrated, but the power efficiency is still below 10%. We will give an overview of the challenges to realize high-performing devices and summarize state-of-the-art results, including our schemes for optically guided devices that are used in the best blue VCSELs today. In addition, we will present our method to simultaneously achieve high-reflectivity mirrors and good control over the cavity length for ultraviolet VCSELs. This has resulted in, to the best of our knowledge, the shortest VCSEL emission wavelength around 310 nm.
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| 8. |
- Haglund, Åsa, 1976, et al.
(författare)
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Out of the blue: UV VCSELs
- 2022
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - 0277-786X .- 1996-756X. ; PC12001
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Konferensbidrag (refereegranskat)abstract
- In recent years, there has been tremendous improvement in the performance of blue-emitting vertical-cavity surface-emitting lasers (VCSELs) and they are now on the cusp of commercialization. We will summarize state-of-the-art results and outline the main challenges in extending the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by selective electrochemical etching has been essential to demonstrate the world’s first UV-B VCSEL. The use of dielectric mirrors, where one material has a negative thermo-optical coefficient, counteracts the inherent red-shift of the resonance wavelength, enabling a temperature-stable emission.
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| 9. |
- Haglund, Åsa, 1976, et al.
(författare)
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Recent progress for blue VCSELs and challenges to move to UV
- 2020
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- We will summarize state-of-the-art results in III-nitride-based vertical-cavity surface-emitting lasers (VCSELs) and the main challenges in going from blue to ultraviolet-emitting devices. In particular we will highlight how to reduce threshold current densities by using optically guided cavities and our method to simultaneously achieve high-reflectivity mirrors and good control over the cavity length for AlGaN-based ultraviolet VCSELs. The latter has resulted in the shortest emission wavelength from a VCSEL at around 310 nm. This claim of lasing is supported by a nonlinear increase in output power versus pump power and a simultaneous beam width and spectral narrowing around threshold.
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| 10. |
- Haglund, Åsa, 1976, et al.
(författare)
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The quest for ultraviolet vertical-cavity surface-emitting lasers
- 2023
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Ingår i: 2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2023.
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Konferensbidrag (refereegranskat)abstract
- We daily rely upon vertical-cavity surface-emitting lasers (VCSELs) for facial recognition and data communication. These lasers are now experiencing exponential growth and serves in other applications as well such as oxygen monitoring in combustion processes and in anesthetized patients in hospitals and as a source of heating in industry in the form of a large-sized array. The large interest for this laser class is linked to its beneficial qualities such as low threshold current, circular-symmetric low-divergent output beam, high efficiency, compactness, and low fabrication cost due to on-wafer testing. Due to these advantages, there is a strong push to realize VCSELs in other wavelength regimes, beyond the commercially available infrared and red. This would open completely new markets such as flood lights, projectors, sterilization, and medical diagnosis and treatment.
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| 11. |
- Haglund, Åsa, 1976, et al.
(författare)
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Thin-film UV VCSELs and LEDs by electrochemical etching
- 2022
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - 0277-786X .- 1996-756X. ; PC12022
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Konferensbidrag (refereegranskat)abstract
- We will give an overview of state-of-the-art results and challenges to achieve high-performing III-nitride vertical-cavity surface-emitting lasers (VCSELs), with a particular focus on the requirements to push the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by electrochemical etching enabled the world’s first UV-B VCSEL. The use of dielectric mirrors yielded lasers with a very temperature-stable emission wavelength thanks to the negative thermo-optic coefficient of the mirrors. We have used the same etch methodology to also lift-off fully processed LEDs from their growth substrate to improve the light extraction efficiency.
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| 12. |
- Haglund, Åsa, 1976, et al.
(författare)
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UV VCSELs – this is the way
- 2022
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Ingår i: 9th Workshop on Physics and Technology of Semiconductor Lasers.
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Konferensbidrag (refereegranskat)
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| 13. |
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| 14. |
- Hjort, Filip, 1991, et al.
(författare)
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A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser
- 2021
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Ingår i: ACS Photonics. - : American Chemical Society (ACS). - 2330-4022. ; 8:1, s. 135-141
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Tidskriftsartikel (refereegranskat)abstract
- Ultraviolet light is essential for disinfection, fluorescence excitation, curing, and medical treatment. An ultraviolet light source with the small footprint and excellent optical characteristics of vertical-cavity surface-emitting lasers (VCSELs) may enable new applications in all these areas. Until now, there have only been a few demonstrations of ultraviolet-emitting VCSELs, mainly optically pumped, and all with low Al-content AlGaN cavities and emission near the bandgap of GaN (360 nm). Here, we demonstrate an optically pumped VCSEL emitting in the UVB spectrum (280-320 nm) at room temperature, having an Al0.60Ga0.40N cavity between two dielectric distributed Bragg reflectors. The double dielectric distributed Bragg reflector design was realized by substrate removal using electrochemical etching. Our method is further extendable to even shorter wavelengths, which would establish a technology that enables VCSEL emission from UVA (320-400 nm) to UVC (<280 nm).
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| 15. |
- Hjort, Filip, 1991, et al.
(författare)
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Advances in ultraviolet-emitting vertical-cavity surface-emitting lasers
- 2021
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 11686
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Konferensbidrag (refereegranskat)abstract
- We will give an overview of the progress in ultraviolet-emitting vertical-cavity surface-emitting lasers (VCSELs) and their potential applications in areas such as disinfection and medical therapy. This includes our demonstration of the shortest wavelength VCSEL, emitting at 310 nm under optical pumping, and a detailed analysis of its filamentary lasing characteristics. The UVB-emitting AlGaN-based VCSEL was realized by substrate removal using electrochemical etching, enabling the use of two high-reflectivity dielectric distributed Bragg reflectors. The potential of using this or alternative methods to push the emission to shorter wavelengths will be examined as well as concepts to realize electrically injected devices.
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