| 1. |
- Fernandes, Daniel Filipe Félix, et al.
(författare)
-
Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
- 2023
-
Ingår i: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 467
-
Tidskriftsartikel (refereegranskat)abstract
- Reactive High Power Impulse Magnetron Sputtering (HiPIMS) of TiO2 thin films was carried out to investigate the influence of ion parameters and the deposition temperature on the film crystallinity and photocatalytic performance. In order to limit unintentional substrate heating, a deposition setup with long target-to-substrate distance was used. Different HiPIMS pulse configurations, deposition temperatures and substrate bias were evaluated. TiO2 films prepared by pulsed dc magnetron sputtering were used as reference. Films deposited at room temperature were all found to be X-ray amorphous, and a minimum temperature of 200 degrees C was needed for film crystallization irrespective of the mode of operation. This is attributed to the relatively long target-to -substrate distance of 180 mm used in this work. The growth of a specific polymorph was shown to be depen-dent on the operation mode, where a high oxygen partial pressure was ideal for anatase formation. The pho-todegradation rates were, as expected, found to be highest for crystalline samples, where single-and mixed-phase films yielded similar rates. Furthermore, the photodegradation rates of HiPIMS films deposited without substrate heating could be enhanced up to 3 times as compared to the corresponding pulsed dc reference film. The ion assistance in HiPIMS is also beneficial at moderate temperatures, here 200 degrees C, where an improved crystallinity as compared to pdcMS, was observed.
|
|
| 2. |
- Jacobo-Martin, Alejandra, et al.
(författare)
-
Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO2 sputter-coated PMMA films
- 2022
-
Ingår i: Applied Surface Science. - : Elsevier. - 0169-4332 .- 1873-5584. ; 585
-
Tidskriftsartikel (refereegranskat)abstract
- Moth-eye nanostructures are amongst the most remarkable surfaces in nature because of their multi-functionality including antireflection, self-cleaning and bactericidal ability. Moth-eye surfaces consist of subwavelength arrays of tapered nanostructures, which are challenging to reproduce artificially. Nanoimprint lithography is probably one of the most suited technologies for this purpose. However, the poor mechanical resilience and durability of the polymeric nanocones when exposed to the environment, hinders their use in actual applications. To overcome these limitations, this work demonstrates the use of a thin oxide coating over the polymer moth-eye features imprinted on poly methyl methacrylate (PMMA) films. Particularly TiO2 conformal thin film coatings are deposited by unipolar pulsed dc magnetron sputtering over the antireflective nanopatterns acting as encapsulant. The coating, while preserving the antireflective properties, protects the nanostructures against mechanical scratching and improves substantially their thermal stability to over 250 ?. Furthermore, the TiO2 layer provides additional photoinduced self-cleaning functionality and at the same time it protects the matrix from UV photodegradation. The robust and durable antireflective surfaces developed here may find application on solar cells covers, flat panel displays or on optical components.
|
|
| 3. |
- Kubart, Tomas, 1977-, et al.
(författare)
-
On the description of metal ion return in reactive high power impulse magnetron sputtering
- 2021
-
Ingår i: Surface & Coatings Technology. - : Elsevier. - 0257-8972 .- 1879-3347. ; 418
-
Tidskriftsartikel (refereegranskat)abstract
- Back-attraction of ionized metal is an important process in reactive high power impulse magnetron sputtering (R-HiPIMS). Here, we discuss the implementation of the metal return in balance type models for reactive magnetron sputtering. We show that the existing description of surface processes needs to be modified to satisfy mass conservation. A new steady-state time-averaged model is presented and used to evaluate the effect of the metal return in R-HiPIMS. The results show that the metal return leads to an increased oxide fraction in the deposited coating in R-HiPIMS. This effect can explain the high rate deposition of stoichiometric compounds deposited in the metal mode of operation that has been observed experimentally.
|
|
