| 1. |
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| 2. |
- Bleiker, Simon J., et al.
(författare)
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Adhesive wafer bonding with ultra-thin intermediate polymer layers
- 2017
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Ingår i: Sensors and Actuators A-Physical. - : Elsevier. - 0924-4247 .- 1873-3069. ; 260, s. 16-23
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Tidskriftsartikel (refereegranskat)abstract
- Wafer bonding methods with ultra-thin intermediate bonding layers are critically important in heterogeneous 3D integration technologies for many NEMS and photonic device applications. A promising wafer bonding approach for 3D integration is adhesive bonding. So far however, adhesive bonding processes relied on relatively thick intermediate adhesive layers. In this paper, we present an adhesive wafer bonding process using an ultra-thin intermediate adhesive layer with sub-200 nm thickness. We demonstrate adhesive bonding of silicon wafers with a near perfect bonding yield of >99% and achieve less than ±10% non-uniformity of the intermediate layer thickness across an entire 100 mm-diameter wafer. A bond strength of 4.8 MPa was measured for our polymer adhesive, which is considerably higher than previously reported for other ultra-thin film adhesives. Additionally, the adhesive polymer used in the proposed method features excellent chemical and mechanical stability. We also report on a potential strategy for mitigating the formation of micro-voids in the polymer adhesive at the bond interface. Furthermore, the polymer adhesive can be sacrificially removed by oxygen plasma etching for both isotropic and anisotropic release etching. The characteristics of the adhesive wafer bonding process and its compatibility with CMOS wafers, makes it very attractive for heterogeneous 3D integration processes targeted at CMOS-integrated NEMS and photonic devices.
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| 3. |
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| 4. |
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| 5. |
- Fan, Xuge, et al.
(författare)
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Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
- 2019
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Ingår i: Nature Electronics. - : Nature Publishing Group. - 2520-1131. ; 2:9, s. 394-404
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Tidskriftsartikel (refereegranskat)abstract
- Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next-generation mobile, wearable and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring–mass and piezoresistive transducers. The transducers, which are created using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. With our devices, we also extract the Young’s modulus values of double-layer graphene and show that the graphene ribbons have significant built-in stresses.
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| 6. |
- Fan, Xuge, et al.
(författare)
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Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
- 2020
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Ingår i: MICROSYSTEMS & NANOENGINEERING. - : NATURE PUBLISHING GROUP. - 2055-7434. ; 6:1
-
Tidskriftsartikel (refereegranskat)abstract
- Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 mu m to 110 mu m, and suspended proof masses consisting of solid silicon cubes that are from 5 mu mx5 mu mx16.4 mu m to 100 mu mx100 mu mx16.4 mu m in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to 7000nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.
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| 7. |
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| 8. |
- Fan, Xuge, et al.
(författare)
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Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers
- 2019
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Ingår i: Nano letters (Print). - : American Chemical Society (ACS). - 1530-6984 .- 1530-6992. ; 19:10, s. 6788-6799
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Tidskriftsartikel (refereegranskat)abstract
- Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.
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| 9. |
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| 10. |
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| 11. |
- Fischer, Andreas C., 1982-, et al.
(författare)
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Wafer-level integration of NiTi shape memory alloy wires for the fabrication of microactuators using standard wire bonding technology
- 2011
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Ingår i: 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011 IEEE. - : IEEE. ; , s. 348-351
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Konferensbidrag (refereegranskat)abstract
- This paper reports on the first integration of SMA wires into silicon based MEMS structures using a standard wire bonder. This approach allows fast and efficient placement, alignment and mechanical attachment of NiTi-based SMA wires to silicon-based MEMS. The wires are mechanically anchored and clamped into deep-etched silicon structures on a wafer. The placement precision is high with an average deviation of 4 #x03BC;m and the mechanical clamping is strong, allowing successful actuation of the SMA wires.
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| 12. |
- Fischer, Andreas C., 1982-, et al.
(författare)
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Wire-bonder-assisted integration of non-bondable SMA wires into MEMS substrates
- 2012
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Ingår i: Journal of Micromechanics and Microengineering. - : Institute of Physics Publishing (IOPP). - 0960-1317 .- 1361-6439. ; 22:5, s. 055025-
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Tidskriftsartikel (refereegranskat)abstract
- This paper reports on a novel technique for the integration of NiTi shape memory alloy wires and other non-bondable wire materials into silicon-based microelectromechanical system structures using a standard wire-bonding tool. The efficient placement and alignment functions of the wire-bonding tool are used to mechanically attach the wire to deep-etched silicon anchoring and clamping structures. This approach enables a reliable and accurate integration of wire materials that cannot be wire bonded by traditional means.
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| 13. |
- Gatty, Hithesh K., et al.
(författare)
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Temporary Wafer Bonding and Debonding for 3D Integration Using an Electrochemically Active Polymer Adhesive
- 2014
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Ingår i: ECS Journal of Solid State Science and Technology. - : The Electrochemical Society. - 2162-8769 .- 2162-8777. ; 3:5, s. P115-P121
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Tidskriftsartikel (refereegranskat)abstract
- The use of thin silicon wafers is an enabling technology for 3D integration in the semiconductor industry. However, thin silicon wafers are fragile to handle and reliable solutions are required for thin wafer handling. This paper reports a novel method of bonding and debonding a thin wafer (< 50 mu m) using an electrochemically active polymer adhesive. In the presented method the carrier wafer is first spin coated with the adhesive and then bonded to the device wafer by applying force and temperature. Debonding of the wafer is realized at room temperature by applying a voltage between the carrier and the device wafer, which substantially reduces the bond strength. The bonding and debonding properties of the adhesive show that temporary wafer bonding using electrochemically active adhesives has the potential to be an attractive approach for temporary wafer bonding for thin wafer handling in 3D integration processes.
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| 14. |
- Geisler, Ursula, et al.
(författare)
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Musik baut Brücken? Über Bedingungen und Schwierigkeiten transnationaler Kulturforschung
- 2010
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Ingår i: Vom alten Norden zum neuen Europa: Politische Kultur im Ostseeraum. Festschrift für Bernd Henningsen. - 9783830517818 ; , s. 409-422
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Bokkapitel (övrigt vetenskapligt/konstnärligt)abstract
- This contribution deals with the topic of transnationalism as it has developed in the humanities in the last two decades. The starting point for the reflections is the author's experiences over the course of two research projects in the years 1996 to 2003. "Musik baut Brücken?" seeks to highlight some of the definitions and difficulties of "transnationalism" which have become obvious in several debates and in research projects. Employing illuminating, empirical examples, this text pays particular attention to music, folk songs and community singing from a Swedish-German perspective.
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| 15. |
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| 16. |
- Haettner Aurelius, Eva, et al.
(författare)
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Transcendensens metaforer. En jeanpaulsk tradition i svensk dikt
- 2018
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Ingår i: Schriftfest | Festschrift für Annegret Heitmann. - 9783831646890 ; 33, s. 370-389
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Bokkapitel (refereegranskat)abstract
- En specifik typ av metaforer i svensk dikt, där ord för triviala ting krockar med ord för höga, abstrakta ting härleds till den tyske diktaren Jean Paul (1763 - 1825), och visas i Tegnérs, C F Dahlgrens, E A Karlfeldts, Birger Sjöbergs och Tomas Tranströmer dikter. Metafortypen är förbunden med en teologisk idé om metaforens möjlighet att överskrida gränsen mellan det jordiska och det himmelska.
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| 17. |
- Hess, Timo, et al.
(författare)
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Dissecting the genetic heterogeneity of gastric cancer
- 2023
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Ingår i: EBioMedicine. - : Elsevier. - 2352-3964. ; 92
-
Tidskriftsartikel (refereegranskat)abstract
- Background: Gastric cancer (GC) is clinically heterogenous according to location (cardia/non-cardia) and histopathology (diffuse/intestinal). We aimed to characterize the genetic risk architecture of GC according to its subtypes. Another aim was to examine whether cardia GC and oesophageal adenocarcinoma (OAC) and its precursor lesion Barrett's oesophagus (BO), which are all located at the gastro-oesophageal junction (GOJ), share polygenic risk architecture.Methods: We did a meta-analysis of ten European genome-wide association studies (GWAS) of GC and its subtypes. All patients had a histopathologically confirmed diagnosis of gastric adenocarcinoma. For the identification of risk genes among GWAS loci we did a transcriptome-wide association study (TWAS) and expression quantitative trait locus (eQTL) study from gastric corpus and antrum mucosa. To test whether cardia GC and OAC/BO share genetic aetiology we also used a European GWAS sample with OAC/BO.Findings: Our GWAS consisting of 5816 patients and 10,999 controls highlights the genetic heterogeneity of GC according to its subtypes. We newly identified two and replicated five GC risk loci, all of them with subtype-specific association. The gastric transcriptome data consisting of 361 corpus and 342 antrum mucosa samples revealed that an upregulated expression of MUC1, ANKRD50, PTGER4, and PSCA are plausible GC-pathomechanisms at four GWAS loci. At another risk locus, we found that the blood-group 0 exerts protective effects for non-cardia and diffuse GC, while blood-group A increases risk for both GC subtypes. Furthermore, our GWAS on cardia GC and OAC/BO (10,279 patients, 16,527 controls) showed that both cancer entities share genetic aetiology at the polygenic level and identified two new risk loci on the single-marker level.Interpretation: Our findings show that the pathophysiology of GC is genetically heterogenous according to location and histopathology. Moreover, our findings point to common molecular mechanisms underlying cardia GC and OAC/BO.
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| 18. |
- Hockenjos, Vreni, 1972-
(författare)
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Picturing Dissolving Views : August Strindberg and the Visual Media of His Age
- 2007
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- The subject of this study is August Strindberg’s interaction with the visual media of his day. Its dual aim is to examine Strindberg’s work in the light of media history and to allow Strindberg’s work in turn to illuminate the media history of the fin de siècle. Taking its cue from the commonplace scholarly observation that Strindberg’s drama, particularly that of his later phase, is strikingly “cinematic”, it asks: What do such comparisons really tell us about Strindberg’s art and what, if anything, do they tell us about cinema?The thesis of this study is that the putatively “cinematic” style of Strindberg’s writings can only be understood against the backdrop of a mass culture, oriented towards the visual sense, which was undergoing rapid expansion at the turn of the last century. In devising his “dream play techniques”, it argues, Strindberg both drew on and reacted against various image-based modes of representation that had become extremely widespread in the late nineteenth century. The loss of reality that is so prominent a feature of works such as To Damascus (1898) or A Dream Play (1901) should in this sense be regarded as marked by an experience of mediatization, that is, the steady incorporation of all aspects of daily life by mass media technologies. Shifting the spotlight away from cinema, a critical encounter with Strindberg’s work can cast light on largely overlooked media practices such as magic lantern or Sciopticon exhibition, panoramic entertainments, instantaneous photography, and the introduction of the halftone process in printing. At the same time as it unsettles received notions of Strindberg’s drama as “cinematic”, the study seeks to show how the writings of this revolutionary artist can provide fresh material for a reassessment of life in a media-saturated age.
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| 19. |
- Hussain, Muhammad Waqar, 1985-, et al.
(författare)
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A 500 °C Active Down-Conversion Mixer in Silicon Carbide Bipolar Technology
- 2018
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Ingår i: IEEE Electron Device Letters. - : IEEE Press. - 0741-3106 .- 1558-0563. ; 39:6, s. 855-858
-
Tidskriftsartikel (refereegranskat)abstract
- This letter presents an active down-conversion mixer for high-temperature communication receivers. The mixer is based on an in-house developed 4H-SiC BJT and down-converts a narrow-band RF input signal centered around 59 MHz to an intermediate frequency of 500 kHz. Measurements show that the mixer operates from room temperature up to 500 °C. The conversion gain is 15 dB at 25 °C, which decreases to 4.7 dB at 500 °C. The input 1-dB compression point is 1 dBm at 25 °C and −2.5 dBm at 500 °C. The mixer is biased with a collector current of 10 mA from a 20 V supply and has a maximum DC power consumption of 204 mW. High-temperature reliability evaluation of the mixer shows a conversion gain degradation of 1.4 dB after 3-hours of continuous operation at 500 °C.
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| 20. |
- Hussain, Muhammad Waqar, 1985-, et al.
(författare)
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An Intermediate Frequency Amplifier for High-Temperature Applications
- 2018
-
Ingår i: IEEE Transactions on Electron Devices. - : Institute of Electrical and Electronics Engineers (IEEE). - 0018-9383 .- 1557-9646. ; 65:4, s. 1411-1418
-
Tidskriftsartikel (refereegranskat)abstract
- This paper presents a two-stage small signal intermediate frequency amplifier for high-temperature communication systems. The proposed amplifier is implemented using in-house silicon carbide bipolar technology. Measurements show that the proposed amplifier can operate from room temperature up to 251 °C. At a center frequency of 54.6 MHz, the amplifier has a gain of 22 dB at room temperature, which decreases gradually to 16 dB at 251 °C. Throughout the measured temperature range, it achieves an input and output return loss of less than-7 and-11 dB, respectively. The amplifier has a 1-dB output compression point of about 1.4 dBm, which remains fairly constant with temperature. Each amplifier stage is biased with a collector current of 10 mA and a base-collector voltage of 3 V. Under the aforementioned biasing, the maximum power dissipation of the amplifier is 221 mW.
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| 21. |
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| 22. |
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| 23. |
- Levan, A. J., et al.
(författare)
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The Environment of the Binary Neutron Star Merger GW170817
- 2017
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Ingår i: Astrophysical Journal Letters. - : American Astronomical Society. - 2041-8205 .- 2041-8213. ; 848:2
-
Tidskriftsartikel (refereegranskat)abstract
- We present Hubble Space Telescope (HST) and Chandra imaging, combined with Very Large Telescope MUSE integral field spectroscopy of the counterpart and host galaxy of the first binary neutron star merger detected via gravitational-wave emission by LIGO and Virgo, GW170817. The host galaxy, NGC 4993, is an S0 galaxy at z - 0.009783. There is evidence for large, face-on spiral shells in continuum imaging, and edge-on spiral features visible in nebular emission lines. This suggests that NGC 4993 has undergone a relatively recent (less than or similar to 1 Gyr) dry merger. This merger may provide the fuel for a weak active nucleus seen in Chandra imaging. At the location of the counterpart, HST imaging implies there is no globular or young stellar cluster, with a limit of a few thousand solar masses for any young system. The population in the vicinity is predominantly old with less than or similar to 1% of any light arising from a population with ages <500 Myr. Both the host galaxy properties and those of the transient location are consistent with the distributions seen for short-duration gamma-ray bursts, although the source position lies well within the effective radius (r(e) similar to 3 kpc), providing an r(e)-normalized offset that is closer than similar to 90% of short GRBs. For the long delay time implied by the stellar population, this suggests that the kick velocity was significantly less than the galaxy escape velocity. We do not see any narrow host galaxy interstellar medium features within the counterpart spectrum, implying low extinction, and that the binary may lie in front of the bulk of the host galaxy.
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| 24. |
- Mattsson, Niklas, 1979, et al.
(författare)
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The Alzheimer's Association external quality control program for cerebrospinal fluid biomarkers.
- 2011
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Ingår i: Alzheimer's & dementia : the journal of the Alzheimer's Association. - : Wiley. - 1552-5279. ; 7:4
-
Tidskriftsartikel (refereegranskat)abstract
- The cerebrospinal fluid (CSF) biomarkers amyloid β (Aβ)-42, total-tau (T-tau), and phosphorylated-tau (P-tau) demonstrate good diagnostic accuracy for Alzheimer's disease (AD). However, there are large variations in biomarker measurements between studies, and between and within laboratories. The Alzheimer's Association has initiated a global quality control program to estimate and monitor variability of measurements, quantify batch-to-batch assay variations, and identify sources of variability. In this article, we present the results from the first two rounds of the program.
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| 25. |
- Otto, Katharina, et al.
(författare)
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MASCOT’s in situ analysis of asteroid Ryugu in the context of regolith samples and remote sensing data returned by Hayabusa2
- 2023
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Ingår i: Earth Planets and Space. - : Springer. - 1343-8832 .- 1880-5981. ; 75:1
-
Tidskriftsartikel (refereegranskat)abstract
- The Hayabusa2 mission provided a unique data set of asteroid Ryugu that covers a wide range of spatial scale from the orbiter remote sensing instruments to the returned samples. The MASCOT lander that was delivered onto the surface of Ryugu aimed to provide context for these data sets by producing in situ data collected by a camera (MasCam), a radiometer (MARA), a magnetometer (MasMag) and a spectrometer (MicrOmega). In this work, we evaluate the success of MASCOT as an integrated lander to bridge the gap between orbiter and returned sample analysis. We find that MASCOT’s measurements and derivatives thereof, including the rock morphology, colour in the visible wavelengths, possible meteorite analogue, density, and porosity of the rock at the landing site are in good agreement with those of the orbiter and the returned samples. However, it also provides information on the spatial scale (sub-millimetres to centimetres) at which some physical properties such as the thermal inertia and reflectance undergo scale-dependent changes. Some of the in situ observations such as the presence of clast/inclusions in rocks and the absence of fine particles at the landing site was uniquely identified by MASCOT. Thus, we conclude that the delivery of an in situ instrument like MASCOT provides a valuable data set that complements and provides context for remote sensing and returned sample analyses.
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| 26. |
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| 27. |
- Pagliano, Simone, et al.
(författare)
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3D Printing by Two-Photon Polymerization of Polyimide Objects and Demonstration of a 3D-printed Micro-Hotplate
- 2023
-
Ingår i: Advanced Materials Technologies. - : Wiley. - 2365-709X. ; 8:19
-
Tidskriftsartikel (refereegranskat)abstract
- Polyimides are polymeric materials with outstanding thermal, chemical, and mechanical properties. For this reason, they find applications in several engineering sectors, including aerospace, microsystems, and biomedical applications. For realizing 3D structures made of polyimides, 3D printing is an attractive technique because it overcomes the limitations of polyimide processing using conventional manufacturing techniques such as molding and subtractive manufacturing. However, current polyimide 3D printing approaches are limited to realizing objects with the smallest dimensions of the order of a few hundred micrometers. 3D printing of polyimide objects featuring sub-micrometer resolution using two-photon polymerization by direct laser writing is demonstrated here. A negative photosensitive polyimide is applied that is widely used in microsystems applications. To demonstrate the utility of this polyimide 3D printing approach and the compatibility of the 3D objects with operation at elevated temperatures, a micro-hotplate is 3D printed and characterized at operating temperatures of above 300 °C.
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| 28. |
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| 29. |
- Schröder, Stephan, et al.
(författare)
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A large-area single-filament infrared emitter and its application in a spectroscopic ethanol gas sensing system
- 2021
-
Ingår i: Microsystems and Nanoengineering. - : Springer Nature. - 2055-7434. ; 7:1
-
Tidskriftsartikel (refereegranskat)abstract
- Nondispersive infrared (NDIR) spectroscopy is an important technology for highly accurate and maintenance-free sensing of gases, such as ethanol and carbon dioxide. However, NDIR spectroscopy systems are currently too expensive, e.g., for consumer and automotive applications, as the infrared (IR) emitter is a critical but costly component of these systems. Here, we report on a low-cost large-area IR emitter featuring a broadband emission spectrum suitable for small NDIR gas spectroscopy systems. The infrared emitter utilizes Joule heating of a Kanthal (FeCrAl) filament that is integrated in the base substrate using an automated high-speed wire bonding process, enabling simple and rapid formation of a long meander-shaped filament. We describe the critical infrared emitter characteristics, including the effective infrared emission spectrum, thermal frequency response, and power consumption. Finally, we integrate the emitter into a handheld breath alcohol analyzer and show its operation in both laboratory and real-world settings, thereby demonstrating the potential of the emitter for future low-cost optical gas sensor applications. © 2021, The Author(s).
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| 30. |
- Schröder, Stephan, 1979-
(författare)
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A Large-Area Single-Filament Infrared Emitter for Spectroscopic Gas Sensing of Ethanol
-
Annan publikation (övrigt vetenskapligt/konstnärligt)abstract
- Non-dispersive infrared spectroscopy is a promising technology for highly-accurate and maintenance-free gas sensing of ethanol. However, non-dispersive infrared sensor systems are currently too expensive for many application areas such as consumer and automotive applications. The infrared emitter is a critical and relatively costly component in today’s non-dispersive infrared systems. Here we report on a low-cost large-area single filament infrared emitter that is viable for non-dispersive infrared gas spectroscopy systems with small dimensions. The proposed infrared emitter is based on joule heating of a Kanthal filament and provides a broadband emission spectrum suitable for non-dispersive infrared gas sensing. Placement and attachment of the filament on the substrate is performed using a conventional high-speed automated wire bonding tool. Our fabrication approach enables simple and rapid rendering of a large meander-shaped emitter filament. Operation and performance of the fabricated infrared emitters were studied using Fourier transform infrared spectroscopy to analyse the effective infrared emission spectrum relevant for non-dispersive infrared gas sensing. Thermal properties such as temperature distribution across the infrared emitter was investigated. To demonstrate the viability of the meander-shaped infrared emitter for non-dispersive infrared gas sensing, the IR emitter was implemented in a non-dispersive infrared gas sensor system and the detection of varying ethanol concentrations as well as the detection of elevated breath alcohol concentration levels was demonstrated.
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| 31. |
- Schröder, Stephan, 1979-, et al.
(författare)
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A low-cost nitric oxide gas sensor based on bonded gold wires
- 2017
-
Ingår i: TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. - : Institute of Electrical and Electronics Engineers (IEEE). - 9781538627310 ; , s. 1457-1460
-
Konferensbidrag (refereegranskat)abstract
- In this paper we report of a novel and very simple fabrication method for realizing amperometric gas sensors using conventional wire bonding technology. Working and counter electrodes are made of 360 vertically standing bond wires, entirely manufactured by a fully automated, standard wire bonding tool. Our process enables standing bond wires with a length of 1.24 mm, resulting in an extremely high aspect-ratio of 50, thus effectively increasing the surface area of the working electrode. All gas sensor electrodes are embedded in a polymer-based, solid electrolyte. Therefore, laborious handling of liquid electrolytes can be avoided. Here, we report of a nitric oxide (NO) gas sensor that is capable of detecting NO gas concentrations down to the single-digit ppm range. The proposed approach demonstrates the feasibility towards a scalable and entire back-end fabrication concept for low-cost NO gas sensors.
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| 32. |
- Schröder, Stephan, 1979-, et al.
(författare)
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A single wire large-area filament emitter for spectroscopic ethanol gas sensing fabricated using a wire bonding tool
- 2017
-
Ingår i: TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. - : IEEE. - 9781538627327 ; , s. 315-318
-
Konferensbidrag (refereegranskat)abstract
- Non-dispersive infrared (NDIR) gas spectroscopy is a highly accurate optical gas sensing technology, which has been implemented in various industrial applications. However NDIR systems remain too expensive for many consumer and automotive apphcations. The cost of the infrared (IR) emitter component is a substantial part of the total system cost. In this paper we report of a single filament IR emitter that is fabricated using wire bonding technology. Our fabrication approach offers the prospect of a fully automated assembly by means of utihzing a wire bonding tool to integrate the single filament to the MEMS structured silicon substrate. An apphcation-specific wire bond trajectory enables the mechanical attachment of the filament to form the meander-shaped emitter with a total area of 1 mm2. The fabricated IR emitter utilizes a Kanthal (FeCrAl) filament with very high thermal stability and excellent emitting properties under atmospheric conditions. The packaged IR emitter has been characterized using Fourier transform infrared (FTIR) spectroscopy to study the emitted IR spectrum with respect to the requirements of NDIR systems.
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| 33. |
- Schröder, Stephan, 1979-, et al.
(författare)
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Fabrication of an Infrared Emitter using a Generic Integration Platform Based on Wire Bonding
- 2016
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Ingår i: Journal of Micromechanics and Microengineering. - : Institute of Physics (IOP). - 0960-1317 .- 1361-6439. ; 26:11
-
Tidskriftsartikel (refereegranskat)abstract
- This paper reports a novel approach for the fabrication of infrared (IR)emitters for non-dispersive infrared gas sensing. The proposed concept enables theintegration of superior resistive heater materials with microelectromechanical systems(MEMS) structures. In this study, non-bondable filaments made of nickel chromium areattached to mechanical attachment structures using a fully automated state-of-the-artwire bonder. The formation of the electrical contacts between the integrated filamentsand the electrical contact pattern on the substrate is performed using conventionalgold stud bumping technology. The placement accuracy of the integrated filamentsis evaluated using white-light interferometry, while the contact formation using studbumping to embed the filaments is investigated using focus ion beam milled crosssections.A proof-of-concept IR emitter has been successfully operated and heated upto 960 C in continuous mode for 3 hours.
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| 34. |
- Schröder, Stephan, et al.
(författare)
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Stress-Minimized Packaging of Inertial Sensors by Double-Sided Bond Wire Attachment
- 2015
-
Ingår i: Journal of microelectromechanical systems. - 1057-7157 .- 1941-0158. ; 24:4, s. 781-789
-
Tidskriftsartikel (refereegranskat)abstract
- This paper presents a novel approach for low-stress packaging of microelectromechanical system (MEMS)-based gyroscopes. The proposed approach makes use of conventional ball-stitch wire bonding. The gyroscope die is attached exclusively by means of bond wire connections between the package frame, and the top and bottom surfaces of the die. The process enables the electrical connection of metal pads on the top and the bottom side of the MEMS die within the same process. No adhesives, glue, or solder is used for the die attach. The stiffness of the proposed die attach is evaluated by scanning laser Doppler vibrometry. White-light interferometry is used to investigate stress in the die that is induced by the die attach. The bond wire attachment is compared with conventional single-sided die attach using two types of commercially available adhesives. It was found that the proposed packaging system exhibits multiple resonance modes and displays a dependence on the amount of bond wires. White-light interferometry reveals a centered bow across the die and shows low-induced stresses compared with conventionally attached dies using epoxy adhesives.
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| 35. |
- Schröder, Stephan, 1979-, et al.
(författare)
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Stress-minimized packaging of inertial sensors using wire bonding
- 2013
-
Ingår i: 2013 Transducers and Eurosensors XXVII. - : IEEE conference proceedings. - 9781467359818 - 9781467359832 ; , s. 1962-1965
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Konferensbidrag (refereegranskat)abstract
- This paper presents a packaging approach for inertial sensors using wire bonding technology. The die is mounted exclusively by bond wires on the front- and backside to the package. Conventional single-side die attach to substrates, such as gluing, is abandoned. The approach is characterized by its novel and symmetric die attach concept as well as its simplicity of applying a standard wire bonding process. The wire bond attachment facilitates significant reduction of thermally induced mechanical stresses. The attachment concept is characterized in terms of attachment stiffness and potential die resonances using Laser Doppler Vibrometry (LDV). White-light interferometry is used to investigate stress related warping that is induced by the die attachment process.
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| 36. |
- Schröder, Stephan, 1979-
(författare)
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Towards Unconventional Applications of Wire Bonding
- 2018
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- This thesis presents novel heterogeneous integration approaches of wire materials to fabricated and package MEMS devices by exploring unconventional applications of wire bonding technology. Wire bonding, traditionally endemic in the realm of device packaging to establish electrical die-to-package interconnections, is an attractive back-end technology, offering promising features, such as high throughput, flexibility and placement accuracy. Exploiting the advantages of state-of-the-art wire bonding technology and substitute the conventional micro welding approach with an innovative attachment concept, a generic integration platform for a multitude of wire materials is provided. This facilitates a cost-efficient and selective integration, which involves the attachment and shaping of a variety of intrinsically non-bondable wire materials. Furthermore, the selective integration of wire materials provides a simple method to generate complex suspended geometries, which circumvents the need for subsequent processing. The first part of this thesis reports of the integration of non-bondable shape memory alloy wires on wafer-level, which has led to an innovative method to fabricate micro actuators. Moreover, the integration of high performance resistive heating wires on chip-level is utilized to fabricate filament based infrared emitters, targeting non-dispersive infrared gas sensing of alcohol for automotive applications. In the second part, a series of unconventional applications of wire integration using the traditional thermo-sonic wire bonding approach is presented. A novel and low-cost nitric oxide gas sensor is realized by producing vertical bond wires featuring high aspect ratio. Next, the high placement accuracy of wire bonding tools is leveraged to integrate conductive metals cores for fabricating high aspect ratio through silicon vias. Finally, an advanced packaging approach for stress-sensitive MEMS gyroscopes is evaluated, which exclusively utilizes bond wires for realizing the die attachment.
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| 37. |
- Schröder, Stephan, 1979-, et al.
(författare)
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Very high aspect ratio through silicon vias (TSVs) using wire bonding
- 2013
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Ingår i: Transducers & Eurosensors XXVII. - : IEEE conference proceedings. - 9781467359832 ; , s. 167-170
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Konferensbidrag (refereegranskat)abstract
- This paper reports a fabrication approach for very high aspect ratio through silicon vias (TSVs). The metal filling of the through via holes is implemented by adapting standard wire bonding technology. TSVs with a diameter of 30 μm and aspect ratios between 10:1 and 20:1 have been fabricated. Basic electrical characterization and optical inspection have been conducted to verify the resistance and integrity of the metal and insulator filling of the TSV.
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| 38. |
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| 39. |
- Smith, Anderson D., et al.
(författare)
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Biaxial strain in suspended graphene membranes for piezoresistive sensing
- 2014
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Ingår i: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). - : IEEE. - 9781479935093 ; , s. 1055-1058
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Konferensbidrag (refereegranskat)abstract
- Pressure sensors based on suspended graphene membranes have shown extraordinary sensitivity for uniaxial strains, which originates from graphene's unique electrical and mechanical properties and thinness [1]. This work compares through both theory and experiment the effect of cavity shape and size on the sensitivity of piezoresistive pressure sensors based on suspended graphene membranes. Further, the paper analyzes the effect of both biaxial and uniaxial strain on the membranes. Previous studies examined uniaxial strain through the fabrication of long, rectangular cavities. The present work uses circular cavities of varying sizes in order to obtain data from biaxially strained graphene membranes.
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| 40. |
- Smith, Anderson D., et al.
(författare)
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Graphene-based CO2 sensing and its cross-sensitivity with humidity
- 2017
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Ingår i: RSC Advances. - : Royal Society of Chemistry. - 2046-2069. ; 7:36, s. 22329-22339
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Tidskriftsartikel (refereegranskat)abstract
- We present graphene-based CO2 sensing and analyze its cross-sensitivity with humidity. In order to assess the selectivity of graphene-based gas sensing to various gases, measurements are performed in argon (Ar), nitrogen (N-2), oxygen (O-2), carbon dioxide (CO2), and air by selectively venting the desired gas from compressed gas bottles into an evacuated vacuum chamber. The sensors provide a direct electrical readout in response to changes in high concentrations, from these bottles, of CO2, O-2, nitrogen and argon, as well as changes in humidity from venting atmospheric air. From the signal response to each gas species, the relative graphene sensitivity to each gas is extracted as a relationship between the percentagechange in graphene's resistance response to changes in vacuum chamber pressure. Although there is virtually no response from O-2, N-2 and Ar, there is a sizeable cross-sensitivity between CO2 and humidity occurring at high CO2 concentrations. However, under atmospheric concentrations of CO2, this cross-sensitivity effect is negligible - allowing for the use of graphene-based humidity sensing in atmospheric environments. Finally, charge density difference calculations, computed using density functional theory (DFT) are presented in order to illustrate the bonding of CO2 and water molecules on graphene and the alterations of the graphene electronic structure due to the interactions with the substrate and the molecules.
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| 41. |
- Smith, Anderson D., et al.
(författare)
-
Graphene-based CO2 sensing and its cross-sensitivity with humidity
- 2017
-
Ingår i: RSC Advances. - : Royal Society of Chemistry. - 2046-2069. ; 7:36, s. 22329-22339
-
Tidskriftsartikel (refereegranskat)abstract
- We present graphene-based CO2 sensing and analyze its cross-sensitivity with humidity. In order to assess the selectivity of graphene-based gas sensing to various gases, measurements are performed in argon (Ar), nitrogen (N2), oxygen (O2), carbon dioxide (CO2), and air by selectively venting the desired gas from compressed gas bottles into an evacuated vacuum chamber. The sensors provide a direct electrical readout in response to changes in high concentrations, from these bottles, of CO2, O2, nitrogen and argon, as well as changes in humidity from venting atmospheric air. From the signal response to each gas species, the relative graphene sensitivity to each gas is extracted as a relationship between the percentage-change in graphene's resistance response to changes in vacuum chamber pressure. Although there is virtually no response from O2, N2 and Ar, there is a sizeable cross-sensitivity between CO2 and humidity occurring at high CO2 concentrations. However, under atmospheric concentrations of CO2, this cross-sensitivity effect is negligible – allowing for the use of graphene-based humidity sensing in atmospheric environments. Finally, charge density difference calculations, computed using density functional theory (DFT) are presented in order to illustrate the bonding of CO2 and water molecules on graphene and the alterations of the graphene electronic structure due to the interactions with the substrate and the molecules.
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| 42. |
- Smith, Anderson David, et al.
(författare)
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Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
- 2016
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Ingår i: ACS Nano. - : American Chemical Society (ACS). - 1936-0851 .- 1936-086X. ; 10:11, s. 9879-9886
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Tidskriftsartikel (refereegranskat)abstract
- Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.
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| 43. |
- Smith, Anderson D., et al.
(författare)
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Resistive graphene humidity sensors with rapid and direct electrical readout
- 2015
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Ingår i: Nanoscale. - : Royal Society of Chemistry (RSC). - 2040-3364 .- 2040-3372. ; 7:45, s. 19099-19109
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate humidity sensing using a change of the electrical resistance of single-layer chemical vapor deposited (CVD) graphene that is placed on top of a SiO2 layer on a Si wafer. To investigate the selectivity of the sensor towards the most common constituents in air, its signal response was characterized individually for water vapor (H2O), nitrogen (N-2), oxygen (O-2), and argon (Ar). In order to assess the humidity sensing effect for a range from 1% relative humidity (RH) to 96% RH, the devices were characterized both in a vacuum chamber and in a humidity chamber at atmospheric pressure. The measured response and recovery times of the graphene humidity sensors are on the order of several hundred milliseconds. Density functional theory simulations are employed to further investigate the sensitivity of the graphene devices towards water vapor. The interaction between the electrostatic dipole moment of the water and the impurity bands in the SiO(2)d substrate leads to electrostatic doping of the graphene layer. The proposed graphene sensor provides rapid response direct electrical readout and is compatible with back end of the line (BEOL) integration on top of CMOS-based integrated circuits.
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| 44. |
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| 45. |
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| 46. |
- Wang, Xiaojing, et al.
(författare)
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Transfer printing of nanomaterials and microstructures using a wire bonder
- 2019
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Ingår i: Journal of Micromechanics and Microengineering. - : Institute of Physics Publishing (IOPP). - 0960-1317 .- 1361-6439. ; 29:12
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Tidskriftsartikel (refereegranskat)abstract
- Scalable and cost-efficient transfer of nanomaterials and microstructures from their original fabrication substrate to a new host substrate is a key challenge for realizing heterogeneously integrated functional systems, such as sensors, photonics, and electronics. Here we demonstrate a high-throughput and versatile integration method utilizing conventional wire bonding tools to transfer-print carbon nanotubes (CNTs) and silicon microstructures. Standard ball stitch wire bonding cycles were used as scalable and high-speed pick-and-place operations to realize the material transfer. Our experimental results demonstrated successful transfer printing of single-walled CNTs (100 μm-diameter patches) from their growth substrate to polydimethylsiloxane, parylene, or Au/parylene electrode substrates, and realization of field emission cathodes made of CNTs on a silicon substrate. Field emission measurements manifested excellent emission performance of the CNT electrodes. Further, we demonstrated the utility of a high-speed wire bonder for transfer printing of silicon microstructures (60 μm × 60 μm × 20 μm) from the original silicon on insulator substrate to a new host substrate. The achieved placement accuracy of the CNT patches and silicon microstructures on the target substrates were within ± 4 μm. These results show the potential of using established and extremely cost-efficient semiconductor wire bonding infrastructure for transfer printing of nanomaterials and microstructures to realize integrated microsystems and flexible electronics.
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| 47. |
- Zillén, Erik, et al.
(författare)
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Redistributed Bodiliness : The Reception of French Fable Comedies in Eighteenth-Century Scandinavia
- 2016
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Ingår i: Kosmopolitismus und Körperlichkeit im europäischen Theater des 18. Jahrhunderts. - 9783831644285 ; , s. 49-66
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Bokkapitel (refereegranskat)abstract
- The chapter traces the eighteenth-century reception in Scandinavia of Edme Boursault’s fable comedy Esope (1690). After some initial difficulties, Boursault’s play, innovatively combining the popular genres of fable and comedy, scored a success at the Comédie Française and was also staged abroad. The fable comedy in 1722 reached the playhouse in Copenhagen in a Danish translation, entitled Aesopus and based on the English adaptation. Aesopus was, however, performed only once. Moreover, the fables were subsequently broken loose from the comedy and published separately. The paper discusses the abortive Danish reaction to the fable comedy in terms of a redistribution of the double function of utile dulci. Since the fables in Boursault’s theatrical invention were assigned primarily the function of moral usefulness, they had – in order to regain their full pleasure value and their full corporeality – to be liberated from the dramatic whole. Thus interpreted, the Danish reception reflects the basic instability of the French genre fusion.
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