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- Yantchev, Ventsislav, 1976-, et al.
(författare)
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Analysis of Resonant SAW -Plate BAW Interaction in Periodical Couplers
- 2008
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Konferensbidrag (refereegranskat)abstract
- Surface acoustic waves (SAW) scattering into asemi-infinite solid have been studied since the early 60-ies. Inthe case of a substrate with finite plate-like dimensions thescattering into bulk waves (BAW) is transformed intoscattering to bulk plate modes. There have been some attemptsto model the phenomenon but the most interesting case ofinteraction of SAW with BAW resonator, i.e. scattering in aquasi-perpendicular direction was not considered. Theresonant interaction between Rayleigh SAW and near-onsetPlate Waves in isotropic solids, through the coupling effect ofan infinite periodical grating defined on the plate surface istheoretically described and its characteristics revealed. Theanalysis proposed is based on the Bloch theorem. The gratingboundary conditions are considered assuming a weak surfaceperturbation. Further, the eigenmodes along with amplituderatios inside such types of gratings are determined. Initialresults on Gulyaev-Bljustein wave (GBW) – thickness shearmode (TSM) interaction are also presented.
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- Yantchev, Ventsislav, 1976-, et al.
(författare)
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Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
- 2007
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Konferensbidrag (refereegranskat)abstract
- Thin film plate acoustic wave resonators utilizing thelowest order symmetric Lamb wave (S0) propagating in highlytextured 2μm thick Aluminum Nitride (AlN) membranes weresuccessfully demonstrated for the first time [1]. Further theutilization of fast lateral modes in thin films has recently beingtargeted independently by other groups as well [2,3]. Theunperturbed S0 mode in thin film AlN has an acoustic wavevelocity in excess of 10 000 m/s with a weak dispersion andsufficient coupling. Q factors of around 1800 were demonstratedfor 890 MHz one-port synchronous resonators operating in thevicinity of the upper stopband edge [1]. In this work anexperimental study on the resonators’ performance vs variety ofdesign parameters is performed. Devices operating in thevicinity of the stopband center offering a Q of up to 3000 at afrequency of around 875 MHz are demonstrated. Further,micromachined 2-port longitudinally coupled thin filmresonators utilizing the S0 mode are demonstrated for the firsttime.
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