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- Liljeholm, Jessica, et al.
(författare)
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Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
- 2015
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Ingår i: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. - : IEEE conference proceedings. ; , s. 811-814
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Konferensbidrag (refereegranskat)abstract
- This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.
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