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- Arapan, Lilia, et al.
(författare)
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Thin film plate acoustic resonators for integrated microwave power oscillator applications
- 2011
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Ingår i: Electronics Letters. - : Institution of Engineering and Technology (IET). - 0013-5194 .- 1350-911X. ; 47:7, s. 452-453
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Tidskriftsartikel (refereegranskat)abstract
- Two-port film plate acoustic resonators (FPAR) devices operating on the lowest order symmetric Lamb wave mode (S0) in C-oriented AlN membranes on Si were fabricated and tested for their power handling capabilities in a feedback-loop power oscillator circuit. The FPAR was operated at an incident power level of 24 dBm for several weeks without performance degradation. Its flicker noise constant was calculated from close-in phase noise data as αR=2.1×10^−36/Hz. The results indicate that IC-compatible S0 FPARs are well suited for integrated microwave oscillators with thermal noise floor (TNF) levels below −175 dBc/Hz.
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