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  • Thornell, Greger, et al. (author)
  • Micromachining by ion track lithography
  • 1999
  • In: SENSORS AND ACTUATORS A-PHYSICAL. - : ELSEVIER SCIENCE SA. - 0924-4247. ; 73:1-2, s. 176-183
  • Journal article (peer-reviewed)abstract
    • Micromachining by ion track etching (MITE) based on the lithographic projection of a mask onto an arbitrary ion track recording material using a parallel beam of highly energetic heavy ions, is described here. By this, deep microstructures have been produ
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Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Hjort, Klas (1)
van Veldhuizen, Elbe ... (1)
Thornell, Greger (1)
Spohr, R (1)
University
Uppsala University (1)
Language
English (1)
Research subject (UKÄ/SCB)
Engineering and Technology (1)
Year

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