SwePub
Sök i SwePub databas

  Extended search

Träfflista för sökning "id:"swepub:oai:research.chalmers.se:5156233b-45ee-4ec0-a257-70fc8cc9214e" "

Search: id:"swepub:oai:research.chalmers.se:5156233b-45ee-4ec0-a257-70fc8cc9214e"

  • Result 1-1 of 1
Sort/group result
   
EnumerationReferenceCoverFind
1.
  • Ljungberg, Karin, et al. (author)
  • Optimized cleaning processes for silicon wafer bonding
  • 1996
  • In: Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces. UCPSS '96. ; , s. 123-
  • Conference paper (peer-reviewed)abstract
    • The use of SPFM (H2SO4-H2O2-HF) at low HF concentrations (10-1000 ppm) has been investigated as a pre-cleaning procedure for silicon direct bonding. This cleaning procedure can be tuned to simultaneously give hydrophilic surface properties, ensuring good bondability, and excellent electric properties, crucial for the application of direct bonding in device applications
  •  
Skapa referenser, mejla, bekava och länka
  • Result 1-1 of 1
Type of publication
conference paper (1)
Type of content
peer-reviewed (1)
Author/Editor
Bengtsson, Stefan, 1 ... (1)
Ljungberg, Karin (1)
University
Chalmers University of Technology (1)
Language
English (1)
Research subject (UKÄ/SCB)
Engineering and Technology (1)
Year
1996 (1)

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

 
pil uppåt Close

Copy and save the link in order to return to this view