Mechanically Coupled Comb Drive MEMS Stages

• An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)

Nyckelord

electrostatic actuation

Mechanical coupling

MEMS stage

Publikations- och innehållstyp

kon (ämneskategori)

ref (ämneskategori)