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- Carlsson, Patrick, 1975-, et al.
(författare)
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Electron paramagnetic resonance study on n-type electron-irradiated 3C-SiC
- 2008
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Ingår i: PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY. - BRISTOL, ENGLAND : IOP PUBLISHING LTD.
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Konferensbidrag (refereegranskat)abstract
- Electron Paramagnetic Resonance (EPR) was used to study defects in n-type 3C-SiC films irradiated by 3-MeV electrons at room temperature with a dose of 2x10(18) cm(-2). After electron irradiation, two new EPR spectra with an effective spin S = 1, labeled L5 and L6, were observed. The L5 center has C-3v symmetry with g = 2.004 and a fine-structure parameter D = 436.5 x 10(-4) cm(-1). The L5 spectrum was only detected under light illumination and it could not be detected after annealing at similar to 550 C. The principal z-axis of the D tensor is parallel to the < 111 >-directions, indicating the location of spins along the Si-C bonds. Judging from the symmetry and the fact that the signal was detected under illumination in n-type material, the L5 center may be related to the divacancy in the neutral charge state. The L6 center has a C-2v-symmetry with an isotropic g-value of g=2.003 and the fine structure parameters D=547.7 x 10(-4) cm-1 and E=56.2 x 10(-4) cm(-1). The L6 center disappeared after annealing at a rather low temperature (similar to 200 degrees C), which is substantially lower than the known annealing temperatures for vacancy-related defects in 3C-SiC. This highly mobile defect may be related to carbon interstitials.
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- Isoya, J., et al.
(författare)
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EPR identification of intrinsic defects in SiC
- 2008
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Ingår i: Physica status solidi. B, Basic research. - : Wiley. - 0370-1972 .- 1521-3951. ; 245:7, s. 1298-1314
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Tidskriftsartikel (refereegranskat)abstract
- The structure determination of intrinsic defects in 4H-SiC, 6H-SiC, and 3C-SiC by means of EPR is based on measuring the angular dependence of the 29Si/13C hyperfine (HF) satellite lines, from which spin densities, sp-hybrid ratio, and p-orbital direction can be determined over major atoms comprising a defect. In most cases, not only the assignment of the variety due to the inequivalent sites (h- and k-sites in 4H-SiC) but also the identification of the defect species is accomplished through the comparison of the obtained HF parameters with those obtained from first principles calculations. Our works of identifying vacancy-related defects such as the monovacancies, divacancies, and antisite-vacancy pairs in 4H-SiC are reviewed. In addition, it is demonstrated that the observation of the central line of the TV2a center of S = 3/2 has been achieved by pulsed-ELDOR. © 2008 Wiley-VCH Verlag GmbH & Co. KGaA.
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