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On-chip tensile tes...
On-chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams
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Bhaskar, U. (author)
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Passi, V. (author)
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- Södervall, Ulf, 1954 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Nilsson, Bengt, 1954 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Petersson, Göran, 1946 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Hagberg, Mats, 1962 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Pardoen, T. (author)
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Raskin, J.-P. (author)
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(creator_code:org_t)
- 2011
- 2011
- English.
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In: Advanced Materials Research. - 1662-8985 .- 1022-6680. ; 276, s. 117-126
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http://dx.doi.org/10...
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https://doi.org/10.4...
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Abstract
Subject headings
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- A simple and versatile on-chip tensile testing method is proposed for the statistical evaluation of size effects on the mechanical strength of silicon thin films along with the simultaneous study of (from low to ultra) strain effects on the carrier transport. Mechanical results are presented on the fracture strength of micro-nano scale silicon beams, followed with a discussion on interface states and problems facing reliable nano-electronic and nano-electromechanical characterizations
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Thin film testing
- Fracture strength of silicon
- Silicon nanowires
- Piezoresistivity
- Mechanical and electro-mechanical properties of silicon
- Surface states
- Environmental impact on measurement
- On-chip tensile testing
- MEMS/NEMS
- Nano-mechanical testing
- Fracture
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Bhaskar, U.
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Passi, V.
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Södervall, Ulf, ...
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Nilsson, Bengt, ...
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Petersson, Göran ...
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Hagberg, Mats, 1 ...
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show more...
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Pardoen, T.
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Raskin, J.-P.
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
- Articles in the publication
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Advanced Materia ...
- By the university
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Chalmers University of Technology