Sökning: L773:1084 6999 OR L773:9781424496327
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MEMS sensor for in ...
MEMS sensor for in situ TEM Atomic Force Microscopy
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- Nafari, Alexandra, 1980 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Karlén, David, 1979 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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Rusu, Cristina (författare)
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visa fler...
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Svensson, Krister (författare)
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Olin, Håkan (författare)
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- Enoksson, Peter, 1957 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa färre...
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(creator_code:org_t)
- 2007
- 2007
- Engelska.
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Ingår i: IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS. - 1084-6999. ; , s. 103-106
- Relaterad länk:
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https://research.cha...
Abstract
Ämnesord
Stäng
- AbstractHere we present a MEMS atomic force microscope (AFM) sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Atomic Force Microscopy (AFM)
- MEMS
- in situ
- Transmission Electron Microscope (TEM)
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