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- Bengtsson, Stefan, 1961, et al.
(författare)
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IC process compatible preparation of silicon interfaces using the silicon-to-silicon direct bonding method
- 1989
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Ingår i: ESSDERC '89. 19th European Solid State Devices Research Conference. ; , s. 353-
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Konferensbidrag (refereegranskat)abstract
- Silicon/silicon interfaces were prepared by wafer bonding using the silicon-to-silicon direct bonding method. Silicon/silicon interfaces (n/n-type) with excellent electric properties were prepared, by using hydrophobic wafer surfaces, at temperatures in the range of 700°C to 1000°C. The influence of the bonded interface on device characteristics of bonded p+n junctions prepared at low temperatures was seen as n-factors larger than 2 at forward bias. A correlation between n-factors and the density of states in the bandgap was found. In hydrophilic samples, the density of voids at the bonded interface was determined mainly in the contacting of the wafer surfaces at room temperature. Compared to hydrophilic samples, hydrophobic samples were held together at a smaller fraction of the area before heat treatment. After the heat treatments, no difference in the density of voids was found
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- Kröll, Stefan, et al.
(författare)
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Influence of laser mode amplitude and laser mode phase fluctuations on spectral noise in CARS
- 1989
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Ingår i: Quantum Electron Laser Sci Conf. ; , s. 92-92
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Konferensbidrag (refereegranskat)abstract
- A model for calculating the noise in nonlinear optical processes arising from (nonquantum) stochastic fluctuations (mode beating) in and between the lasers participating in the nonlinear interaction has been previously developed. Assuming that all individual laser mode phases and laser modes are (statistically) independent (Gaussian statistics) and that the nonlinear interaction can be expressed as a perturbation expansion in the participating fields, deterministic expressions for the expected intensity and higher order moments for the signal were obtained in a straightforward way. The authors have explicitly evaluated the deterministic expressions, obtaining closed-form expressions for the SNR in coherent anti-Stokes Raman scattering (CARS) as a function of laser mode spacing, laser and Raman bandwidths and the duration of the anti-Stokes pulse. Those results qualitatively agreed with their experimental results. The theoretical analysis further indicates that the (nonquantum) noise in nonlinear optical processes from multimode lasers can be separated into terms (explicitly evaluated) arising from shot-to-shot fluctuations in the laser mode amplitudes and terms arising from shot-to-shot fluctuations in the individual laser mode phases.
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