| 1. |
- Mattsson, Claes, 1978-, et al.
(författare)
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Design of a Micromachined Thermopile Infrared Sensor with a Self-Supported SiO2/SU-8 Membrane
- 2008
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Ingår i: IEEE Sensors Journal. - Piscataway, USA : IEEE. - 1530-437X .- 1558-1748. ; 8:12, s. 2044-2052
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Tidskriftsartikel (refereegranskat)abstract
- In the infrared region of the spectrum thermoelectric detectors such as the thermopile, are extensively used. These detectors rely on the well-known Seebeck effect, in which there is a direct conversion of thermoelectric differentials into electrical voltage. The temperature difference over thermocouple junctions is in general, created by forming a thin membrane connected to the silicon bulk. In many existing thermopiles, materials such as Si and Si3N4 have been used as membrane. These materials suffer from relatively high thermal conductivity, which lowers the membrane temperature and reduces the sensitivity of the detector. A material such as SU-8 2002 has a much lower thermal conductivity and is applied using standard photolithographic processing steps. This work presents thermal simulations regarding the use of SU-8 2002 as a thermal insulating membrane as compared to Si and Si3N4. The simulation results presented show that the temperature increase in a 5 µm SiO2/SU-8 membrane is about 9% higher than in a 1 µm Si3N4 membrane, despite the membrane thickness being increased by a factor of 5. A thermopile consisting of 196 serially interconnected Ti/Ni thermocouples positioned on a 5 µm SiO2/SU-8 2002 membrane has been fabricated. The sensitivity of the fabricated device has been evaluated in the infrared region, using a 1.56 µm IR laser and a xenon arc lamp together with a monochromator. The measurement results show a sensitivity of approximately 5 V/W over the wavelength range between 900 - 2200 nm. Measurements performed in a vacuum chamber show that the sensitivity of the detector could be increased by more than a factor of 3 by mounting the detector in a vacuum sealed capsule.
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| 2. |
- Mattsson, Claes, et al.
(författare)
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Development of an infrared thermopile detector with a thin self-supporting SU-8 membrane
- 2007
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Ingår i: Proceedings of IEEE Sensors. - New York : IEEE conference proceedings. - 9781424412624 ; , s. 836-839
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Konferensbidrag (refereegranskat)abstract
- In this paper we present the development and characterization of thermopile detector on a 4 mum thin self-supporting membrane made of the epoxy based photoresist SU-8. The membrane is realized using silicon bulk micromachining techniques. In many existing thermopile detectors, a temperature difference over the thermocouple junctions is achieved by connecting a thin membrane of either Si or Si3N4 to a silicon bulk. These materials suffer from relatively high thermal conductivity, which lowers the sensitivity of the detector. A material such as SU-8 has much lower thermal conductivity and is applied using standard photolithographic processing steps. Simulation results are presented which verifies SU-8 as a better choice than Si and Si3N4 when used as thermal insulating membrane in a thermopile detector. A thermopile consisting of 196 series coupled Ti/Ni thermocouples has been fabricated. Results from measurements are presented, showing a sensitivity of 5.6 V/W and a noise equivalent power (NEP) of 9.9 nW/radicHz.
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| 3. |
- Mattsson, Claes, 1978-, et al.
(författare)
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Fabrication and characterization of a design optimized SU-8 thermopile with enhanced sensitivity
- 2009
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Ingår i: Measurement science and technology. - : IOP. - 0957-0233 .- 1361-6501. ; 20:11, s. 115202-
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Tidskriftsartikel (refereegranskat)abstract
- In the infrared wavelength region, thermopiles are an important type of detectors. A major advantage of thermopiles is their non-cooling requirement. Depending on the applied absorption layer, their responsivity is often rather flat within a large wavelength region. This work presents the fabrication and characterization of a sensitivity and design optimized thermopile detector with a 4 µm self-supported SiO2/SU-8 membrane. The structure consists of 240 series interconnected thermocouple junctions obtained by a metal evaporation and lift-off. Two metal combinations have been evaluated, namely, nickel/titanium and aluminium/bismuth. Series resistances of 76 k and 283 k were measured for the Ni/Ti thermopile and the Al/Bi thermopile respectively. For the Al/Bi thermopile a responsivity of 60 V/W was achieved using a 1.56 µm fibre coupled diode laser with a power of 3.5 mW. Using a white light source with a radiation flux of 0.45 W/mm2 a voltage response of 68 V mm2/W was measured for the Al/Bi thermopile. The time constant of the characterized detectors was calculated as being 70 ms, using the pulsed IR laser.
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| 4. |
- Mattsson, Claes, et al.
(författare)
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Fabrication and evaluation of a thermal sensor formed on a thin photosensitive epoxy membrane with low thermal conductivity
- 2008
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Ingår i: PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY. - : Institute of Physics (IOP). ; , s. 082048-
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Konferensbidrag (refereegranskat)abstract
- This article present the fabrication and development of a thin metal film bolometer IR detector connected in a Wheatstone bridge configuration. The bolometer is constructed on a 4 μm thin self-supported SU-8 2002 membrane. A polymer material such as SU-8 has low thermal conductivity and is applied using standard photolithographic processing step, and this could increase detector sensitivity and lower the production cost. Thermal simulation results are presented, which verifies SU-8 as a better choice of materials compared to common membrane materials such as Si and Silicon nitride. Measurements on the fabricated nickel resistance bolometer on SU-8 2002 membrane show a sensitivity of 9.3 V/W when radiated by an IR laser with a wavelength of 1.56 μm.
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| 5. |
- Mattsson, Claes, 1978-, et al.
(författare)
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Thermal simulation and design optimization of a thermopile infrared detector with SU-8 membrane
- 2009
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 19:5, s. 055016-
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Tidskriftsartikel (refereegranskat)abstract
- Simulation and optimization tools are commonly used in the design phase of advanced electronics devices. In this work, we present a thermal simulation and design optimization tool for infrared thermopile detectors based on a closed membrane structure. The tool can be used to simulate and optimize thermopile detectors with an arbitrary number of design parameters. The optimization utilizes the Nelder–Mead and the adaptive simulated annealing optimization algorithms to maximize the system performance. A thermopile detector with an SU-8-based closed membrane and metal–metal thermocouples has been simulated and optimized. Based on the results generated by the tool, an optimized detector has been fabricated and characterized. The results from the measurements presented are in good agreement with the simulation results.
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| 6. |
- Andersson, Henrik, et al.
(författare)
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Processing and Characterization of a MOS Type Tetra Lateral Position Sensitive Detector with Indium Tin Oxide Gate Contact
- 2008
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 8:9-10, s. 1704-1709
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Tidskriftsartikel (refereegranskat)abstract
- A 2-D tetra lateral position sensitive detector (PSD) based on the metal-oxide-semiconductor (MOS) principle has been manufactured and characterized. The active area of the device is 5 nun x 5 mm and the intention is to use the central 4 nun x 4 nun for low nonlinearity measurements. The gate contact is made of indium tin oxide (ITO) that is a degenerate electrically conducting semiconductor, which, in addition, is also transparent in the visible part of the spectrum. The use of a MOS structure results in a processing with no necessity to use implantation or diffusion in order to make the resistive p-layer as in a conventional p-n junction lateral effect PSD. Position measurements show good linearity in the middle 4 nun x 4 mm area. Within the middle 2.1 mm x 2.1 mm, the nonlinearity is within 1.7% of the active area with a position detection error of maximum 60 mu m. Measured MOS IV characteristics are compared to a level 3 spice model fit and show good agreement. The threshold voltage is determined to be -0.03 V. Responsivity measurements show a high sensitivity in the visible spectral region.
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| 7. |
- Bertilsson, Michael, et al.
(författare)
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Laboratory arrangement for soft x-ray zone-plate efficiency measurements
- 2007
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Ingår i: Review of Scientific Instruments. - : AIP Publishing. - 0034-6748 .- 1089-7623. ; 78:2, s. 026103-
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line lambda=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two similar to 55 mu m diameter nickel micro zone plates, showing a groove efficiency of 12.9%+/- 1.1% and 11.7%+/- 1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.
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| 8. |
- Kishida, Ikuko, et al.
(författare)
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Monoamine metabolites level in CSF is related to the 5-HTT gene polymorphism in treatment-resistant depression.
- 2007
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Ingår i: Neuropsychopharmacology : official publication of the American College of Neuropsychopharmacology. - : Springer Science and Business Media LLC. - 0893-133X. ; 32:10, s. 2143-51
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Tidskriftsartikel (refereegranskat)abstract
- The serotonin (5-hydroxytryptamine) transporter (5-HTT) is considered to affect the pathogenesis of mood disorders. Large number of genetic association studies between 5-HTT functional polymorphisms and vulnerability of mood disorders and therapeutic response to antidepressants has been carried out. We investigated the influence of 5-HTT-linked polymorphic region (5-HTTLPR) and 5-HTT 17 bp variable number of tandem repeat polymorphism (5-HTTVNTR) polymorphisms on concentrations of monoamine metabolites in cerebrospinal fluid (CSF) among treatment-resistant patients with mood disorders. Subjects were 119 Swedish patients with persistent mood disorders and 141 healthy subjects. In 112 of these patients, we measured 5-hydroxyindoleacetic acid (5-HIAA), homovanillic acid (HVA), and 3-methoxy-4-hydroxyphenylglycol in CSF. Genotyping for 5-HTT polymorphisms from genomic DNA was carried out by PCR. There was no significant difference in allele/genotype frequency between patients and healthy subjects. In patients with mood disorders, we found significant difference in mean 5-HIAA concentration between 5-HTTLPR genotypes (p=0.03). Although the 5-HIAA concentration showed a tendency to be higher in short (S) carriers than in non-S carriers of the 5-HTTLPR in patients (p=0.06), when considering patients with major depressive disorder (MDD), the 5-HIAA concentration was significantly higher among S carriers than among non-S carriers (p=0.02). Moreover, the 5-HIAA concentration was higher in S/S subjects compared to long (L)/L (p=0.0001) and L/S (p=0.002) subjects in patients with MDD. Similarly, there was higher HVA concentration in S/S subjects compared to L/L (p=0.002) and L/S subjects (p=0.002). There was no effect of 5-HTTVNTR. Our findings show that the 5-HTTLPR polymorphism affects 5-HIAA and HVA concentrations among treatment-resistant patients with mood disorders.
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