WFRF:(Carlsson JO)
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Reactive deposition of diamond and Si carbide films by hydrogen plasma etching of graphite and Si in rf plasma jet
- Bardos, L (author)
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- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Barankova, Hana (author)
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- Carlsson, JO (author)
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- (creator_code:org_t)
- 1993
- 1993
- English.
- In: Thin Solid Films. - 0040-6090 .- 1879-2731. ; 223, s. 218-222
- Journal article (peer-reviewed)
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- art (subject category)
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