| 1. |
- Rocca, J. J., et al.
(författare)
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Compact Soft X-ray Lasers for Imaging, Material Processing, and Characterization at the Nanoscale
- 2007
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Ingår i: 32nd IEEE/CPMT International Electronic Manufacturing Technology Symposium. - 9781424413355 ; , s. 72-73
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Konferensbidrag (refereegranskat)abstract
- As manufacturing of devices advances into the nanoscale, critical feature sizes have rapidly shrunk to below the wavelength of visible light. These advances in nanotechnology have created a need to develop better ways of accessing the nanoworld. The extreme ultraviolet (EUV)/ soft x-ray (SXR) region of the spectrum provides an opportunity to use coherent light at wavelengths that are 10- to 100-times shorter than visible light, at 1 to 100 nm. Given the diffraction limit in imaging resolution, these wavelengths allow us to "see" smaller features and "write" smaller patterns than would be possible with visible light. We have developed compact laser-pumped and discharge-pumped lasers operating at wavelengths of λ=13.2 nm [1] and λ=46.9 nm [2] respectively, and have used them in the demonstration of nanoscale full field imaging [3,4], nanopatterning [5], and nanoscale laser ablation [6]. The high brightness and short wavelength output from these lasers when combined with specialized EUV/SXR optics, offer unique opportunities for the implementation of table-top imaging, patterning and metrology tools with superior spatial resolution for applications in nanoscience and nanotechnology. Using these new compact short wavelength lasers we have built two microscopes, using λ=46.9 nm or λ=l 3.2 nm laser illumination. The compact λ=46.9 nm microscope (Fig. 1a and lb) condenses the light using a multilayer coated Schwarzschild mirror, and images the test object using a diffractive zone plate lens. The spatial resolution of this microscopes was assessed by imaging test samples consisting of dense line gratings of half-periods ranging from 200 down to 35 nm. Figure 2(a) and (b) show images of a 100 nm and 70 nm half-period gratings obtained with the λ =46.9 nm microscope. The lineout in the image of the 70 nm lines shows a modulation of ∼30% indicating that the features are fully resolved according to the Rayleigh criterion. By rearranging the optics, the λ=46.9 nm microscope can also image surfaces. An image of fully resolved dense metal lines, with half-period of 170 nm, patterned on the silicon wafer is shown in Figure 2 (c). The shorter wavelength λ= 3.2 nm microscope uses all zone plate optics to render images of transmissive test patterns with increased spatial resolution . An image of fully resolved 50 nm half-period dense lines acquired with a 20 seconds exposure is shown in Figure 2(d). From images like this one, the spatial resolution of the λ=13.2 nm table-top microscope was determined to be better than 38 nm [3]. The high coherence of these short wavelength lasers also allows for the printing of arrays of nanoscale features using interferometric lithography. We have demonstrated combined a λ=46.9 nm capillary discharge laser and a Lloyd's mirror to print arrays of cone-shaped nano-dots with ∼ 58 nm FWHM diameter (Fig 3a) [5]. The same arrangement was used to print arrays of nano-holes 120 nm FWHM and 100 nm in depth over areas in excess of 500 × 500 μm2 in different photoresists using exposure times as short as 80 s. Larger area patterns can be readily printed using precision translation stages and multiple exposures by overlay superposition. The ability to focus SXL laser light into near diffraction-limited spots also opens the possibility to develop new types of nanoprobes. We have demonstrated ablation of sub-100 nm diameter holes by directly focusing the output of a λ=46.9 nm laser onto a sample with a zone plate lens. Figure 3(b) shows an AFM image of a 82 nm diameter crater obtained ablating a 500 nm thick PMMA layer with a single laser shot. The holes were observed to have very clean walls and high reproducibility. We have recently added the capability to spectroscopically analyze the light emitted from the plasma created during the ablation, opening the possibility to develop analytic nanoprobles. All of these results illustrate the capabilities of compact short wavelength lasers for nanotechnology applications.
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| 2. |
- Menoni, C. S., et al.
(författare)
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Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers
- 2007
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Ingår i: 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5. - 9781424435906 ; , s. 1401-1402
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Konferensbidrag (refereegranskat)abstract
- The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
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| 3. |
- Brizuela, F., et al.
(författare)
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High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
- 2009
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Ingår i: 9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY. - : IOP Publishing.
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Konferensbidrag (refereegranskat)abstract
- Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of table-top zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
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| 4. |
- Brizuela, F., et al.
(författare)
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Near-wavelength Resolution Extreme Ultraviolet Imaging With a Desktop-size Laser
- 2008
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Ingår i: 2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9. ; , s. 400-401
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Konferensbidrag (refereegranskat)abstract
- We have realized the first demonstration of imaging in the extreme ultraviolet (EUV) with near-wavelength spatial resolution, 54 nm, using a uniquely compact full-field microscope that can produce images with a single one nanosecond exposure.
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| 5. |
- Menoni, C. S., et al.
(författare)
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Advances in Nanoscale Resolution Soft X-Ray Laser Microscopy
- 2009
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Ingår i: X-RAY LASERS 2008, PROCEEDINGS. - : Springer Netherlands. - 9781402099236 ; , s. 341-347
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Konferensbidrag (refereegranskat)abstract
- We review our most recent results on table-top, nanometer-scale resolution, microscopy using compact soft x-ray lasers developed at Colorado State University. We have realized the first demonstration of wavelength-resolution microscopy in the soft x-ray spectral range. Images of carbon nanotubes, 50 nm in diameter, were obtained with a single similar to 1 ns duration laser pulse from a desk-top size capinary discharge 46.9 nm laser. We fully characterized the new microscope by measuring the modulation transfer function of the instrument for zone plate objectives with three different numerical apertures, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution with high temporal resolution imaging opens myriad opportunities for imaging nanoscale structures.
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| 6. |
- Menoni, C. S., et al.
(författare)
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Nanoscale resolution microscopy and ablation with extreme ultraviolet lasers
- 2007
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Ingår i: 2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2. - 9781424409242 ; , s. 488-489
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Konferensbidrag (refereegranskat)abstract
- We obtain a spatial resolution down to 38 run with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.
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| 7. |
- Orho-Melander, Marju, et al.
(författare)
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Common Missense Variant in the Glucokinase Regulatory Protein Gene Is Associated With Increased Plasma Triglyceride and C-Reactive Protein but Lower Fasting Glucose Concentrations
- 2008
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Ingår i: Diabetes. - : American Diabetes Association. - 1939-327X .- 0012-1797. ; 57:11, s. 3112-3121
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Tidskriftsartikel (refereegranskat)abstract
- OBJECTIVE-Using the genome-wide association approach, we recently identified the glucokinase regulatory protein gene (GCKR, rs780094) region as a novel quantitative trait locus for plasma triglyceride concentration in Europeans. Here, we sought to study the association of GCKR variants with metabolic phenotypes, including measures of glucose homeostasis, to evaluate the GCYR locus in samples of non-European ancestry and to fine-map across the associated genomic interval. RESEARCH DESIGN AND METHODS-We performed association studies in 12 independent cohorts comprising >45,000 individuals representing several ancestral groups (whites from Northern and Southern Europe, whites from the U.S., African Americans from the U.S., Hispanics of Caribbean origin, and Chinese, Malays, and Asian Indians from Singapore). We conducted genetic fine-mapping across the similar to 417-kb region of linkage disequilibrium. spanning GCKR and 16 other genes on chromosome 2p23 by imputing untyped HapMap single nucleotide polymorphisms (SNPs) and genotyping 104 SNPs across the associated genomic interval. RESULTS-We provide comprehensive evidence that GCYR rs780094 is associated with opposite effects on fasting plasma triglyceride (P-meta = 3 x 10(-56)) and glucose (P-meta = 1 x 10(-13)) concentrations. In addition, we confirmed recent reports that the same SNP is associated with C-reactive protein (CRP) level (P = 5 x 10(-5)). Both fine-mapping approaches revealed a common missense GCKR variant (rs1260326, Pro446Leu, 34% frequency, r(2) = 0.93 with rs780094) as the strongest association signal in the region. CONCLUSIONS-These findings point to a molecular mechanism in humans by which higher triglycerides and CRP can be coupled with lower plasma glucose concentrations and position GCKR in central pathways regulating both hepatic triglyceride and glucose metabolism. Diabetes 57:3112-3121, 2008
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| 8. |
- Perez-Martinez, Pablo, et al.
(författare)
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Association between glucokinase regulatory protein (GCKR) and apolipoprotein A5 (APOA5) gene polymorphisms and triacylglycerol concentrations in fasting, postprandial, and fenofibrate-treated states
- 2009
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Ingår i: American Journal of Clinical Nutrition. - : Elsevier BV. - 1938-3207 .- 0002-9165. ; 89:1, s. 391-399
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Tidskriftsartikel (refereegranskat)abstract
- Background: Hypertriglyceridemia is a risk factor for cardiovascular disease. Variation in the apolipoprotein A5 (APOA5) and glucokinase regulatory protein (GCKR) genes has been associated with fasting plasma triacylglycerol. Objective: We investigated the combined effects of the GCKR rs780094C -> T, APOA5 -1131T -> C, and APOA5 56C -> G single nucleotide polymorphisms (SNPs) on fasting triacylglycerol in several independent populations and the response to a high-fat meal and fenofibrate interventions. Design: We used a cross-sectional design to investigate the association with fasting triacylglycerol in 8 populations from America, Asia, and Europe (n = 7730 men and women) and 2 intervention studies in US whites (n = `1061) to examine postprandial triacylglycerol after a high-fat meal and the response to fenofibrate. We defined 3 combined genotype groups: 1) protective (homozygous for the wild-type allele for all 3 SNPs); 2) intermediate (any mixed genotype not included in groups 1 and 3); and 3) risk (carriers of the variant alleles at both genes). Results: Subjects within the risk group had significantly higher fasting triacylglycerol and a higher prevalence of hypertriglyceridemia than did subjects in the protective group across all populations. Moreover, subjects in the risk group had a greater postprandial triacylglycerol response to a high-fat meal and greater fenofibrate-induced reduction of fasting triacylglycerol than did the other groups, especially among persons with hypertriglyceridemia. Subjects with the intermediate genotype had intermediate values (P for trend < 0.001). Conclusions: SNPs in GCKR and APOA5 have an additive effect on both fasting and postprandial triacylglycerol and contribute to the interindividual variability in response to fenofibrate treatment. Am J Clin Nutr 2009;89:391-9. Clin Nutr 2009; 89: 391-9.
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