| 1. |
- Cho, H., et al.
(författare)
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High density plasma via hole etching in SiC
- 2001
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 19:4, s. 1878-1881
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Tidskriftsartikel (refereegranskat)abstract
- Throughwafer vias up to 100 mum deep were formed in 4H-SiC substrates by inductively coupled plasma etching with SF6/O-2 at a controlled rate of similar to0.6 mum min(-1) and use of Al masks. Selectivities of > 50 for SiC over Al were achieved. Electrical (capacitance-voltage: current-voltage) and chemical (Auger electron spectroscopy) analysis techniques showed that the etching produced only minor changes in reverse breakdown voltage, Schottky barrier height, and near surface stoichiometry of the SiC and had high selectivity over common frontside metallization. The SiC etch rate was a strong function of the incident ion energy during plasma exposure. This process is attractive for power SiC transistors intended for high current, high temperature applications and also for SiC micromachining.
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| 2. |
- Cho, H., et al.
(författare)
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Ultradeep, low-damage dry etching of SiC
- 2000
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 76:6, s. 739-741
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Tidskriftsartikel (refereegranskat)abstract
- The Schottky barrier height (Phi(B)) and reverse breakdown voltage (V-B) of Au/n-SiC diodes were used to examine the effect of inductively coupled plasma SF6/O-2 discharges on the near-surface electrical properties of SiC. For low ion energies (less than or equal to 60 eV) in the discharge, there is minimal change in Phi(B) and V-B, but both parameters degrade at higher energies. Highly anisotropic features typical of through-wafer via holes were formed in SiC using an Al mask.
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| 3. |
- Chu, M.S., et al.
(författare)
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Physics of Plasmas Modeling of Feedback and Rotation Stabilization of the Resistive Wall Mode in Tokamaks
- 2004
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Ingår i: Physics of Plasmas. ; 11, s. 2497-
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Tidskriftsartikel (refereegranskat)abstract
- Steady-state operation of the advanced tokamak reactor relies on maintaining plasma stability with respect to the resistive wall mode ~RWM!. Active magnetic feedback and plasma rotation are the two methods proposed and demonstrated for this purpose. A comprehensive modeling effort including both magnetic feedback and plasma rotation is needed for understanding the physical mechanisms of the stabilization and to project to future devices. For plasma with low rotation, a complete solution for the feedback issue is obtained by assuming the plasma obeys ideal magnetohydrodynamics ~MHDs! and utilizing a normal mode approach ~NMA! @M. S. Chu et al., Nucl. Fusion 43, 441 ~2003!#. It is found that poloidal sensors are more effective than radial sensors and coils inside of the vacuum vessel more effective than outside. For plasmas with non-negligible rotation, a comprehensive linear nonideal MHD code, the MARS-F has been found to be suitable. MARS-F @Y. Q. Liu et al., Phys. Plasmas 7, 3681 ~2000!# has been benchmarked in the ideal MHD limit against the NMA. The effect of rotation stabilization of the plasma depends on the plasma dissipation model. Broad qualitative features of the experiment are reproduced. Rotation reduces the feedback gain required for RWM stabilization. Reduction is significant when rotation is near the critical rotation speed needed for stabilization. The International Thermonuclear Experimental Reactor ~ITER! @R. Aymar et al., Plasma Phys. Controlled Fusion 44, 519 ~2002!# ~scenario IV for advanced tokamak operation! may be feedback stabilized with babove the no wall limit and up to an increment of ;50% towards the ideal limit. Rotation further improves the stability.
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| 4. |
- Lee, K. P., et al.
(författare)
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Comparison of F2 plasma chemistries for deep etching of SiC
- 2001
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Ingår i: Materials Research Society Symposium - Proceedings. - Boston, MA. ; , s. H7.7.1-H7.7.6
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Konferensbidrag (refereegranskat)abstract
- A number of F2-based plasma chemistries (NF3, SF6, PF5 and BF3) were investigated for high rate etching of SiC. The most advantageous of these is SF6, based on the high rate (0.6 Όm·min-) it achieves and its relatively low cost compared to NF3. The changes in electrical properties of the near-surface region are relatively minor when the incident ion energy is kept below approximately 75 eV. At a process pressure of 5 m Torr, the SiC etch rate falls-off by ∌15% in 30 Όm diameter via holes compared to larger diameter holes (> 60 Όm diameter) or open areas on the mask.
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| 5. |
- Wallin, A, et al.
(författare)
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Effect of inhaled fluticasone with and without salmeterol on airway inflammation in asthma
- 2003
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Ingår i: Journal of Allergy and Clinical Immunology. - : Elsevier BV. - 1097-6825 .- 0091-6749. ; 112:1, s. 72-78
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Tidskriftsartikel (refereegranskat)abstract
- Background: The clinical benefit of combining long-acting beta(2)-agonists with inhaled corticosteroids rather than doubling the dose of corticosteroid has been well-documented. However, there are concerns that this might result in a masking of underlying airway inflammation. Objective: The aim of this study was to test the hypothesis that the addition of the long-acting beta(2)-agonist salmeterol (SALM) to a low dose of the inhaled corticosteroid fluticasone propionate (FP) has a steroid-sparing effect and does not result in a worsening of bronchial inflammation compared to doubling the dose of inhaled corticosteroid. Methods: Fifty-six asthmatic subjects, previously not well-controlled on inhaled corticosteroids, were randomized to receive 3 months of treatment with inhaled FP 500 mug twice a day (FP 1000) or FP 200 mug twice a day plus SALM 50 mug twice a day (FP 400 + SALM). Fluticasone propionate 200 mug twice a day served as the control (FP400). Bronchial mucosal biopsy specimens, bronchial washings (BW), and bronchoalveolar lavage were obtained before and after treatment. The primary end points for the study were submucosal mast cell and eosinophil counts. Results: There was a significant improvement in FEV1 in the FP400 + SALM group compared to both the FP400 and FP1000 groups. This was accompanied by a significant improvement in peak expiratory flow in the FP400 + SALM group in both the morning and evening compared to the FP1000 group. There were no significant between treatment differences in the change in the number of submucosal mast cells or eosinophils. However, in the FP400 + SALM group there was a significant decrease in submucosal mast cells after 12 weeks of treatment. The addition of SALM to FP was not associated with any increases in airway inflammation in the biopsy specimens, bronchoalveolar lavage, or bronchial washings. Conclusion: These findings confirm that addition of SALM to FP has clinical benefits but does not mask or exacerbate airway inflammation and suggest that long-acting beta(2)-adrenoceptor agonists might influence mast cell numbers.
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| 6. |
- Carolipio, E. M., et al.
(författare)
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The toroidicity-induced Alfven eigenmode structure in DIII-D : Implications of soft x-ray and beam-ion loss data
- 2001
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Ingår i: Physics of Plasmas. - : AIP Publishing. - 1070-664X .- 1089-7674. ; 8:7, s. 3391-3401
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Tidskriftsartikel (refereegranskat)abstract
- The internal structure of the toroidicity-induced Alfven eigenmode (TAE) is studied by comparing soft x-ray profile and beam ion loss data taken during TAE activity in the DIII-D tokamak [W. W. Heidbrink , Nucl. Fusion 37, 1411 (1997)] with predictions from theories based on ideal magnetohydrodynamic (MHD), gyrofluid, and gyrokinetic models. The soft x-ray measurements indicate a centrally peaked eigenfunction, a feature which is closest to the gyrokinetic model's prediction. The beam ion losses are simulated using a guiding center code. In the simulations, the TAE eigenfunction calculated using the ideal MHD model acts as a perturbation to the equilibrium field. The predicted beam ion losses are an order of magnitude less than the observed similar to6%-8% losses at the peak experimental amplitude of deltaB(r)/B(0)similar or equal to2-5x10(-4).
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| 7. |
- Chu, H.S., et al.
(författare)
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Discovery of Helical Magnetic Fields in AGN and CME and Ejection of Large Scale Magnetic Fields from AGN
- 2003
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Ingår i: Symposium - International astronomical union. - : International Astronomical Union. - 0074-1809. ; 214, s. 303-310
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Tidskriftsartikel (refereegranskat)abstract
- Magnetic Fields are the crucial and most important ingredient involved in the processes of various violent activities in Active Galactic Nuclei and other celestial bodies. The generally accepted 2-sided symmetric-jets model of active galactic nuclei (AGN) does not include the magnetic fields. We present here the first direct detection of helical magnetic field in AGN, and the first direct detection of ejection of large scale magnetic fields from AGN. (CME) 2. The annular (helical) magnetic field is responsible for the collimation of the jet (through Pinch Effect) and may be of crucial importance for extraction of black hole rotational energy. 3. The CMEs are responsible for sporadic ejection of jet components in AGN, while the general accepted 2-sided jets pertain to the quiescent Jets. 4.Observations show that the CME with Asymmetric Jets can explain many phenomena and much of the morphological diversities in AGN.
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| 8. |
- Jin, Yuesheng, et al.
(författare)
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Cytogenetic and fluorescence in situ hybridization characterization of clonal chromosomal aberrations and CCND1 amplification in esophageal carcinomas
- 2004
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Ingår i: Cancer Genetics and Cytogenetics. - 0165-4608. ; 148:1, s. 21-28
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Tidskriftsartikel (refereegranskat)abstract
- Cytogenetic analyses of four squamous cell carcinomas (SCC) of the esophagus showed complex numerical and structural abnormalities. Chromosomal bands or regions preferentially involved were 11q13, 8q10, 21q10, 3p10similar top11, 1p11similar toq11, 5p11similar toq11, and 14p11similar toq11. For the first time, to our knowledge, recurrent aberrations were identified in esophageal SCC, including homogenous staining region (hsr), isochromosomes i(3q) and i(21q), and ring chromosome. Losses of chromosomal material dominated over gains. Recurrent imbalances included under-representation of 4p13similar topter, 5q14similar toqter, 9p22similar topter, 10p, 11p13similar topter, 12p13similar topter, 17p10similar topter, 18p11similar topter, 21p, and 22p, as well as over-representation of 1q25similar toqter, 3q, 7q, and 8q. Interestingly, hsr at different chromosomal regions occur-red in three of four cases. With the application of fluorescence in situ hybridization (FISH) and multicolor combined binary ratio labeling-FISH with specific DNA probes, it could be shown that in two cases the hsr was derived from chromosome 11 material and that the amplicon included CCND1. Our results, together with previous molecular genetic findings, indicate that CCND1 might be a prime target in 11q13 amplification, and that amplification of this gene might be crucial in the tumorigenesis of esophageal SCC. These observed chromosomal aberrations and imbalances thus provide important information for further molecular genetic investigation of esophageal SCC. (C) 2004 Elsevier Inc. All rights reserved.
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| 9. |
- Kassner, A, et al.
(författare)
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Molecular structure and interaction of recombinant human type XVI collagen
- 2004
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Ingår i: Journal of Molecular Biology. - : Elsevier BV. - 1089-8638 .- 0022-2836. ; 339:4, s. 835-853
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Tidskriftsartikel (refereegranskat)abstract
- Collagen XVI is a minor component of at least two different extracellular fibrillar networks of specialized regions of skin and cartilage. In skin, collagen XVI is integrated into particular fibrillin-rich microfibrils lacking an amorphous elastin core. In cartilage, collagen XVI is a component of small heterotypic D-banded fibrils, mainly occurring in the territorial matrix of chondrocytes. Here, we present the first direct evidence for the molecular structure and functional properties of these fibril-associated collagens with interrupted triple helices (FACIT). We have expressed recombinantly the full-length alpha1 chain of human collagen XVI in HEK 293 EBNA cells in large quantities using an episomal expression system. Secreted full-length recombinant collagen XVI forms stable disulfide-bonded homotrimers and is rapidly proteolytically processed to distinct fragments at specific protease sequence motifs, one resembling an aggrecanase recognition site. Limited trypsin digestion assays and thermal transition curves imply sequential thermal denaturation of individual triple helical domains of this recombinant collagen, similar to authentic collagen XVI. Molecular images of collagen XVI reveal rod-like molecules which harbor multiple sharp kinks attributing a highly flexible structure presumably introduced by non-collagenous (NC) regions. Terminally located cloverleaf-shaped nodules correspond to the large NC NC11 domain of trimeric collagen XVI. The total length of individual trimeric recombinant collagen XVI molecules constitutes about 240 nm as calculated by atomic force and negative staining electron microscopy. Recombinant collagen XVI interacts with fibrillin-1 and with fibronectin indicating multiple molecular interactions in which this ubiquitously expressed and versatile FACIT-collagen can participate. In vitro generated collagen XVI provides an indispensable tool for future determination of its function during supramolecular assembly of matrix aggregates and its role in maintenance, organization and interaction of fibrillar structures. (C) 2004 Elsevier Ltd. All rights reserved.
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| 10. |
- La Haye, R.J., et al.
(författare)
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Scaling of the Plasma Rotation Needed for Stabilizing the n = 1 Resistive Wall Mode (Ideal Kink) in the DIII D Tokamak
- 2004
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Ingår i: Nuclear Fusion. - 1741-4326 .- 0029-5515. ; 44, s. 1197-
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Tidskriftsartikel (refereegranskat)abstract
- Experiments in the DIII-D tokamak show that the n = 1 ideal kink can be stabilized by a resistive wall if the plasma is rotating fast enough. A database of the onset of the n = 1 resistive wall mode as a function of the equilibrium toroidal magnetic field, the plasma density and the toroidal rotation has been assembled for plasmas with beta between the theoretically predicted no wall and ideal wall stability limits. The critical rotation frequency is found to scale as the inverse of the Alfvén time with ? ?A 0.02 (evaluated at the q = 2 surface at ? 0.6) or ? ?S 0.7, where ?S is the sound time. The dependence of ? ? A or ? ?S on ?N/?N,no wall from 1?2 is weak and suggests the plasmas are in the 'intermediate dissipation' regime.
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