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- Ebefors, Thorbjörn, et al.
(författare)
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A robust micro conveyer realized by arrayed polyimide joint actuators
- 2000
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 10:3, s. 337-349
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Tidskriftsartikel (refereegranskat)abstract
- A new micro-robotic conveyance system based on arrays of movable robust silicon legs has been developed and investigated. Motion is achieved by thermal expansion in polyimide joint actuators using electrical heating. Successful experiments on moving and rotating flat objects in the millimeter range have been performed with high load capacity. The conveyer consists of a 15 x 5 mm(2) chip having 12 silicon legs, each with a length of 500 mu m. The maximum load conveyed on the structure was 3500 mg. Both transverse and rotational movements have been demonstrated experimentally. Conveyance velocities up to 12 mm s(-1) have been measured. Accelerated lifetime measurements demonstrate the long-term stability of the actuators. The functionality of the: polyimide joint actuators is unaffected after more than 2 x 10(8) load cycles.
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| 2. |
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| 3. |
- Haasl, Sjoerd, et al.
(författare)
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Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurements
- 2002
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Ingår i: FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS. - : IEEE. - 0780371852 ; , s. 336-339
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Konferensbidrag (refereegranskat)abstract
- We present the first micromachined metal hot-wire anemometer sensor for use in near-wall turbulence measurements. To measure close to the surface without the circuitry interfering with the flow, a novel hybrid assembly of the sensor has been developed. We present the design, fabrication and characteristics of this sensor.
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| 4. |
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| 5. |
- Stemme, Göran, 1958-, et al.
(författare)
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Three dimensional alignment method and system
- 2002
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Patent (populärvet., debatt m.m.)abstract
- A system for achieving fixation of one or more moveable micro machined platforms for passively aligned optical components, comprising - a support structure containing structures for passive alignment of optical components- platforms containing structures for passive alignment of optical components- actuators for actively aligning the already passively aligned components on the platforms and the support structure to each other, where the actuators are strong enough while actuating to keep the platforms steady during fixation and weak enough while not actuating so as not to impede the fixation- a fixation mechanism to fixate the moveable platforms to the support structure.
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