Gigahertz Sandwich Strip Inductors Based on Fe-N Films : The Effect of Flux Closure at the Flange

• Planar strip inductors consisting of soft Fe-N films enclosing a conductor made of Cu are fabricated on Si substrates and exhibit 70 to 100% inductance gain at 1 Ghz with quality factors of 3 to 5. The magnetic part of the inductance is less than predicted theoretically, which is attributed to hardening of the magnetic material at the edges of the strip, where the deposition is close to 60 degrees incidence. Test films were fabricated on tilted substrates and found to develop very high anisotropy for deposition angles larger than 30 degrees. Optimizing the flux closure at the strip edges is essential for further improving the performance of sandwich strip inductors.

Ämnesord

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Nyckelord

Gigahertz inductors

magnetic multilayers

Magnetism

Magnetism

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