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- Gudmundsson, Jon Tomas, 1965-, et al.
(författare)
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Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
- 2001
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 78:22, s. 3427-
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate the creation of high-density plasma in a pulsed magnetron discharge. A 2.4 MW pulse, 100 µs wide, with a repetition frequency of 50 Hz is applied to a planar magnetron discharge to study the temporal behavior of the plasma parameters: the electron energy distribution function, the electron density, and the average electron energy. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at 8×1017 m–3, 127 µs after initiating the pulse. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high-energy electron group, the electron density peaks, and the electron energy distribution appears to be Maxwellian like. Following the electron density peak, the plasma becomes more Druyvesteyn like with a higher average electron energy.
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| 4. |
- Gudmundsson, Jon Tomas, 1965-, et al.
(författare)
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Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
- 2002
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Ingår i: Surface and Coatings Technology. - : Elsevier. - 0257-8972 .- 1879-3347. ; 161:2-3, s. 249-256
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate the evolution of the electron, energy distribution and the plasma parameters in a high-density plasma in a pulsed magnetron discharge. The high-density plasma is created by applying a high power pulse (1–2.4 MW) with pulse length 100 μs and repetition frequency of 50 Hz to a planar magnetron discharge. The spatial and temporal behavior of the plasma parameters are investigated using a Langmuir probe; the electron energy distribution function, the electron density and the average electron energy. The electron energy distribution function during and shortly after the pulse can be represented by a bi-Maxwellian distribution indicating two energy groups of electrons. Furthermore, we report on the variation of the plasma parameters and electron energy distribution function with gas pressure in the pressure range 0.5–20 mtorr. We report electron density as high as 4×1018 m−3 at 10 mtorr and 9 cm below the target in a pulsed discharge with average power 300 W. We estimate the traveling speed of the electron density peak along the axis of the discharge. The traveling speed decreases with increased gas pressure from 4×105 cm/s at 0.5 mtorr to 0.87×105 cm s−1 at 10 mtorr. The effective electron temperature peaks at the same time independent of position in the discharge, which indicates a burst of high energy electrons at the end of the pulse.
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