| 1. |
- Abasahl, B., et al.
(författare)
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Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology
- 2018
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- With the progress and industrialization of photonic integrated circuits (PIC) in the past few decades, there is a strong urge towards design and prototyping in a fast, low-cost and reliable manner. In electronics, this demand is met through field programmable gate arrays (FPGA). In the Horizon 2020 MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs) project, we are developing a reconfigurable PIC platform to address this demand in the field of photonics and to facilitate the path from idea towards realization for PIC designers and manufacturers.
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| 2. |
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| 3. |
- Edinger, Pierre, et al.
(författare)
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Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics
- 2019
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Ingår i: 2019 IEEE 32nd international conference on micro electro mechanical systems (MEMS). - : Institute of Electrical and Electronics Engineers (IEEE). - 9781728116105 ; , s. 919-921
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Konferensbidrag (refereegranskat)abstract
- We experimentally demonstrate a silicon MEMS phase shifter achieving more than π phase shift with sub-dB insertion loss (IL). The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation. Our device reaches 1.2π phase shift at only 20 V, with only 0.3 dB insertion loss – an order of magnitude improvement over previously reported MEMS devices. The device has a small footprint of 50×70 µm2 and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters. Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI), and quantum computing.
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| 4. |
- Edinger, Pierre, et al.
(författare)
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Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits
- 2019
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Ingår i: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO). - : IEEE. - 9781943580576
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Konferensbidrag (refereegranskat)abstract
- The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements.
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| 5. |
- Errando-Herranz, Carlos, et al.
(författare)
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Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
- 2015
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Ingår i: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 40:15, s. 3556-3559
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Tidskriftsartikel (refereegranskat)abstract
- We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-€“drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-€“drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -ˆ’62 €€‰pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-€“drop filters.
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| 6. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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Low-power optical beam steering by microelectromechanical waveguide gratings
- 2019
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Ingår i: Optics Letters. - : OPTICAL SOC AMER. - 0146-9592 .- 1539-4794. ; 44:4, s. 855-858
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Tidskriftsartikel (refereegranskat)abstract
- Optical beam steering is key for optical communications, laser mapping (lidar), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower-cost, and more power-efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, to the best of our knowledge, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6 degrees beam steering with 20 V actuation and power consumption below the mu W level, i.e., more than five orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.
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| 7. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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New dynamic silicon photonic components enabled by MEMS technology
- 2018
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Ingår i: Proceedings Volume 10537, Silicon Photonics XIII. - : SPIE - International Society for Optical Engineering. - 9781510615595
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Konferensbidrag (refereegranskat)abstract
- Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.
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| 8. |
- Errando-Herranz, Carlos, et al.
(författare)
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Photonic ring resonators for biosensing
- 2016
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Ingår i: Nanodevices for Photonics and Electronics. - : Pan Stanford Publishing. - 9789814613750 - 9789814613743 ; , s. 385-424
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Bokkapitel (refereegranskat)
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| 9. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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Suspended polarization beam splitter on silicon-on-insulator
- 2018
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Ingår i: Optics Express. - : Optical Society of America. - 1094-4087. ; 26:3, s. 2675-2681
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Tidskriftsartikel (refereegranskat)abstract
- Polarization handling in suspended silicon photonics has the potential to enable new applications in fields such as optomechanics, photonic microelectromechanical systems, and mid-infrared photonics. In this work, we experimentally demonstrate a suspended polarization beam splitter on a silicon-on-insulator waveguide platform, based on an asymmetric directional coupler. Our device presents polarization extinction ratios above 10 and 15 dB, and insertion losses below 5 and 1 dB, for TM and TE polarized input, respectively, across a 40 nm wavelength range at 1550 nm, with a device length below 8 µm. These results make our suspended polarization beam splitter a promising building block for future systems based on polarization diversity suspended photonics.
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| 10. |
- Gylfason, Kristinn B., 1978-, et al.
(författare)
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Integration of polymer based microfluidics with silicon photonics for biosensing applications
- 2015
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light couplin g allows matching the size scale of microfluidics to that of current silicon photonic biosensors.
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