| 1. |
- Ruess, H., et al.
(author)
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HPPMS deposition from composite targets : Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films
- 2017
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In: Vacuum. - : PERGAMON-ELSEVIER SCIENCE LTD. - 0042-207X .- 1879-2715. ; 145, s. 285-289
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Journal article (peer-reviewed)abstract
- The effect of target power density, substrate bias potential and substrate temperature on the thin film composition was studied. A Cr-Al-C composite target was sputtered utilizing direct current (DCMS: 2.3 W/cm(2)) and high power pulsed magnetron sputtering (HPPMS: 373 W/cm(2)) generators. At floating potential, all Cr-Al-C thin films showed similar compositions, independently of the applied target power density. However, as substrate bias potential was increased to -400 V, aluminum deficiencies by a factor of up to 1.6 for DCMS and 4.1 for HPPMS were obtained. Based on the measured ion currents at the substrate, preferential re-sputtering of Al is suggested to cause the dramatic Al depletion. As the substrate temperature was increased to 560 degrees C, the Al concentration was reduced by a factor of up to 1.9 compared to the room temperature deposition. This additional reduction may be rationalized by thermally induced desorption being active in addition to re-sputtering.
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| 2. |
- Lasfargues, H., et al.
(author)
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Non-reactively sputtered ultra-high temperature Hf-C and Ta-C coatings
- 2017
-
In: Surface & Coatings Technology. - : ELSEVIER SCIENCE SA. - 0257-8972 .- 1879-3347. ; 309, s. 436-444
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Journal article (peer-reviewed)abstract
- Transition metal carbides are known for their exceptional thermal stability and mechanical properties, notably governed by the carbon content and the prevalent vacancies on the non-metallic sublattice. However, when using reactive deposition techniques, the formation of amorphous C-containing phases is often observed. Here, we show that non-reactive magnetron sputtering of HfC0.89 or TaC0.92 targets lead to fully crystalline coatings. Their C content depends on the target-to-substrate alignment and globally increases from HfC0.66 to HfC0.76 and from TaC0.69 to TaC0.75 with increasing bias potential from floating to - 100 V, respectively, when using a substrate temperature T-sub of 500 degrees C. Increasing T-sub to 700 degrees C leads to variations from TaC0.71 to TaC0.81. All HfCy films are single-phase face-centered cubic, whereas the TaCy films also contain small fractions of the hexagonal Ta2C phase. The highest hardness and indentation modulus among all coatings studied is obtained for TaC0.75 with H = 41.9 +/- 03 GPa and E = 466.8 +/- 15 GPa. Ab initio calculations predict an easy formation of vacancies on the C-sublattice, especially in the Ta-C system, and a temperature driven stabilization of defected structures at high temperatures, with fewer vacancies on the C sublattice for Hf-C than for Ta-C The predicted phase stability is proven up to 2400 C for both systems by annealing experiments in vacuum.
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