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Träfflista för sökning "WFRF:(Leung U) srt2:(2001-2004)"

Sökning: WFRF:(Leung U) > (2001-2004)

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1.
  • Linnarsson, Margareta K., et al. (författare)
  • Solubility limit and precipitate formation in Al-doped 4H-SiC epitaxial material
  • 2001
  • Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 79:13, s. 2016-2018
  • Tidskriftsartikel (refereegranskat)abstract
    • Heavily Al-doped 4H-SiC structures have been prepared by vapor phase epitaxy. Subsequent anneals have been carried out in an Ar atmosphere in a rf-heated furnace between 1500 degreesC and 2000 degreesC for 0.5 to 3 h. Secondary ion mass spectrometry has been utilized to obtain Al concentration versus depth as well as lateral distributions (ion images). Transmission electron microscopy (TEM) has been employed to study the crystallinity and determine phase composition after heat treatment. A solubility limit of similar to 2x10(20) Al/cm(3) (1900 degreesC) is extracted. Three-dimensional ion images show that the Al distribution does not remain homogeneous in layers heat treated at 1700 degreesC or above when the Al concentration exceeds 2x10(20) cm(-3). Al-containing precipitates are identified by energy-filtered TEM.
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2.
  • Linnarsson, Margareta K., et al. (författare)
  • Solubility limits of dopants in 4H-SiC
  • 2003
  • Ingår i: Applied Surface Science. - 0169-4332 .- 1873-5584. ; 203, s. 427-432
  • Tidskriftsartikel (refereegranskat)abstract
    • Epitaxial 4H-SiC structures with heavily boron or aluminium doped layers have been prepared by vapour phase epitaxy. The samples have been annealed in Ar atmosphere in an RF-heated furnace between 1700 and 2000 degreesC for 45 min to 64 h. Secondary ion mass spectrometry has been employed to obtain depth distributions as well as lateral distributions (ion imaging) for boron and aluminium. Transmission electron microscopy has been used to study the crystallinity and determine phase composition. Solubility limits of similar to 1 x 10(20) Al/cm(3) (1700 degreesC) and < 1 x 10(20) B/cm(3) (1900 degreesC) have been deduced.
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