Through-Glass-Via Enabling Low Loss High-Linearity RF Components

• This paper reports on successful fabrication of metal through glass via (TGV) for low-loss high-linearity wafer-level 3D packages (WLP). The DC resistance was characterized to 28mOhm/TGV and the non-linearity of two sets of TGVs with a 1.1 mm long transmission line was better than 78 dBm (IP3).

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

MEMS Manufacturing

WL packaging

Through Glass Vias (TGV)

RF TGV

Publikations- och innehållstyp

ref (ämneskategori)

kon (ämneskategori)