WFRF:(Lucchese R. R.)
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The behaviour of B (also As) in bilayers of polysilicon and SWi2
- Jahnel, F (author)
- Biersack, J (author)
- d'Heurle, F (author)
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- Fink, D (author)
- Isaac, R (author)
- Lucchese, C (author)
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- (creator_code:org_t)
- 1982
- 1982
- English.
- In: Journal of Applied Physics. - 0021-8979 .- 1089-7550. ; 53, s. 7372-
- Journal article (peer-reviewed)
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- Jahnel, F
- Biersack, J
- d'Heurle, F
- Fink, D
- Isaac, R
- Lucchese, C
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- Petersson, CS
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- Uppsala University
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