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Träfflista för sökning "WFRF:(Martz J.) srt2:(2008)"

Sökning: WFRF:(Martz J.) > (2008)

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1.
  • Brizuela, F., et al. (författare)
  • Near-wavelength Resolution Extreme Ultraviolet Imaging With a Desktop-size Laser
  • 2008
  • Ingår i: 2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9. ; , s. 400-401
  • Konferensbidrag (refereegranskat)abstract
    • We have realized the first demonstration of imaging in the extreme ultraviolet (EUV) with near-wavelength spatial resolution, 54 nm, using a uniquely compact full-field microscope that can produce images with a single one nanosecond exposure.
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2.
  • Wachulak, P., et al. (författare)
  • Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser
  • 2008
  • Ingår i: Journal of the Optical Society of America. B, Optical physics. - : Optical Society of America. - 0740-3224 .- 1520-8540. ; 25:7, s. B104-B107
  • Tidskriftsartikel (refereegranskat)abstract
    • We demonstrate a compact interferometric lithography nanopatterning tool based on an amplitude division interferometer (ADI) and a 46.9 nm wavelength desktop size capillary discharge laser. The system is designed to print arrays of lines, holes, and dots with sizes below 100 nm on high resolution photoresists for the fabrication of arrays of nanostructures with physical and biological applications. The future combination of this ADI with high repetition rate tabletop lasers operating at shorter wavelengths should allow the printing of arrays of sub-10 nm size features with a tabletop setup.
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3.
  • Brewer, Courtney A., et al. (författare)
  • Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
  • 2008
  • Ingår i: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 33:5, s. 518-520
  • Tidskriftsartikel (refereegranskat)abstract
    • We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
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  • Resultat 1-3 av 3

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