Sökning: WFRF:(Molina Aldareguia Jon M)
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Epitaxial stabiliza...
Epitaxial stabilization of cubic-SiNx in TiN/SiNx multilayers
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- Söderberg, Hans (författare)
- Söderberg, H., Division of Engineering Materials, Luleå University of Technology, SE-971 87 Luleå, Sweden
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- Odén, Magnus (författare)
- Luleå tekniska universitet,Materialvetenskap,Odán, M., Division of Engineering Materials, Luleå University of Technology, SE-971 87 Luleå, Sweden
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- Larsson, Tommy (författare)
- Ombenning by 14, SE-737 90 Ängelsberg, Sweden
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- Hultman, Lars (författare)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Molina-Aldareguia, Jon M. (författare)
- CEIT, TECNUN, Paseo de Manuel Lardizabal 15, 20018 San Sebastián, Spain
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Söderberg, H, Division of Engineering Materials, Luleå University of Technology, SE-971 87 Luleå, Sweden Materialvetenskap (creator_code:org_t)
- AIP Publishing, 2006
- 2006
- Engelska.
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 88, s. 191902/1-191902/3
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- The formation of cubic-phase SiNx is demonstrated in TiN/SiNx multilayers deposited by reactive dual magnetron sputtering. Transmission electron microscopy examination shows a transition from epitaxially stabilized growth of crystalline SiNx to amorphous growth as the layer thickness increases from 0.3 to 0.8 nm. The observations are supported by ab initio calculations on different polytypes, which show that the NaCl structure has the best lattice match to TiN. Calculations also reveal a large difference in elastic shear modulus between NaCl-SiNx and TiN. The results for phase structure and shear modulus offer an explanation for the superhardening effect determined by nanoindentation experiments.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
Nyckelord
- Engineering Materials
- Materialteknik
- TECHNOLOGY
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