Modified palladium metal‐oxide‐semiconductor structures with increased ammonia gas sensitivity

• It is known that palladium metal‐oxide‐semiconductor (Pd‐MOS) structures are sensitive detectors for hydrogen gas. We show that the evaporation of a thin film of catalytically active metals on top of the structure can increase the sensitivity towards ammonia considerably. It was found that the thin metal must be in contact with the oxide to cause the increased sensitivity. The largest increase was observed with the transition metals Ir and Pt. The ammonia sensitivity could be enhanced about 60 times compared to that of an unmodified structure

Nyckelord

mos junctions

palladium

ammonia

gases

detectors

sensitivity

silicon

detection

modifications

TECHNOLOGY

TEKNIKVETENSKAP

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