| 1. |
- Bowallius, O., et al.
(författare)
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Scanning capacitance microscopy investigations of SiC structures
- 2001
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Ingår i: Materials Science in Semiconductor Processing. - 1369-8001 .- 1873-4081. ; 4:03-jan, s. 209-211
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Tidskriftsartikel (refereegranskat)abstract
- We have applied scanning capacitance microscopy (SCM) to investigate SIC structures grown by vapour-phase epitaxy. The SCM technique is evaluated using n- and p-type doping staircase structures with doping concentrations ranging from 10(16) to 10(20) cm(-3). The n- and p-type doping was obtained by doping SiC with nitrogen and aluminium, respectively. The sample cross-sections for SCM were obtained by simple cleaving. For doping levels above 10(17) cm(-3) the SCM data are consistent with doping data obtained independently from secondary ion mass spectroscopy (SIMS). Treating the samples with diluted hydrofluoric acid significantly improves the SCM signal for the low-doped regions. The SCM technique has been used to investigate doping redistribution in patterned regrowth of n- and p-type SIC around dry-etched mesas. In both cases, contrast variations were seen close to the mesa walls, indicative of doping variations; lower and higher incorporation for p- and n-type, respectively. The observations are shown to be consistent with the expected trends in dopant incorporation in the SiC material.
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| 2. |
- Janson, M. S., et al.
(författare)
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Transient enhanced diffusion of implanted boron in 4H-silicon carbide
- 2000
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 76:11, s. 1434-1436
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Tidskriftsartikel (refereegranskat)abstract
- Experimental evidence is given for transient enhanced diffusion of boron (B) in ion-implanted silicon carbide (SiC). The implanted B is diffusing several mu m into the samples when annealed at 1600 and 1700 degrees C for 10 min, but the in-diffused tails remain unaffected when the annealing times are increased to 30 min at the same temperatures. A lower limit of the effective B diffusivity at 1600 degrees C is determined to 7x10(-12) cm(2)/s, which is 160 times larger than the equilibrium B diffusivity given in the literature.
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| 3. |
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| 4. |
- Kassamakova, L, et al.
(författare)
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Al/Si ohmic contacts to p-type 4H-SiC for power devices
- 2000
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Ingår i: Materials Science Forum. - 0255-5476 .- 1662-9752. ; 338-3, s. 1009-1012
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Tidskriftsartikel (refereegranskat)abstract
- The formation of Al/Si/p-4H SiC ohmic contacts at temperatures as low as 750 degreesC is reported in this paper. The dependence of electrical properties and contact morphology have been investigated as a function of the annealing regime in the interval 600-700 degreesC. The lowest contact resistivity of 3.8x10(-5) Omega .cm(2) was obtained at 700 degreesC annealing, however the most reproducible results were in the low 10(-4) Omega .cm(2) range. It has been established that the predominate current transport mechanism in the Al/Si/SiC contacts is thermionic-field emission. Atomic force microscopy showed that the addition of Si to the contact layer improves its morphology, and the pitting of annealed Al is not observed. The contacts developed are stable during ageing at 500 degreesC and at operating temperatures up to 450 degreesC. After the contacts testing with current density of 10(3) A/cm(2) at temperatures up to 450 degreesC, their contact resistivity decreases slightly.
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