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- Abermann, S., et al.
(författare)
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Impact of Al-, Ni-, TiN-, and Mo-metal gates on MOCVD-grown HfO2 and ZrO2 high-k dielectrics
- 2007
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Ingår i: Microelectronics and reliability. - : Elsevier BV. - 0026-2714 .- 1872-941X. ; 47:4-5, s. 536-539
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Tidskriftsartikel (refereegranskat)abstract
- In this work we compare the impacts of nickel (Ni), titanium-nitride (TiN), molybdenum (Mo), and aluminium (Al), gates on MOS capacitors incorporating HfO2- or ZrO2-dielectrics. The primary focus lies on interface trapping, oxide charging, and thermodynamical stability during different annealing steps of these gate stacks. Whereas Ni, Mo, and especially TIN are investigated as most promising candidates for future CMOS devices, Al acted as reference gate material to benchmark the parameters. Post-metallization annealing of both, TiN- and Mo-stacks, resulted in very promising electrical characteristics. However, gate stacks annealed at temperatures of 800 degrees C or 950 degrees C show thermodynamic instability and related undesirable high leakage currents.
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- Abermann, S., et al.
(författare)
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Processing and evaluation of metal gate/high-k/Si capacitors incorporating Al, Ni, TiN, and Mo as metal gate, and ZrO2 and HfO2 as high-k dielectric
- 2007
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Ingår i: Microelectronic Engineering. - : Elsevier BV. - 0167-9317 .- 1873-5568. ; 84:5-8, s. 1635-1638
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Tidskriftsartikel (refereegranskat)abstract
- We evaluate various metal gate/high-k/Si capacitors by their resulting electrical characteristics. Therefore, we process MOS gate stacks incorporating aluminium (Al), nickel (Ni), titanium-nitride (TiN), and molybdenum (Mo) as the gate material, and metal organic chemical vapour deposited (MOCVD) ZrO2 and HfO2 as the gate dielectric, respectively. The influence of the processing sequence - especially of the thermal annealing treatment - on the electrical characteristics of the various gate stacks is being investigated. Whereas post metallization annealing in forming gas atmosphere improves capacitance-voltage behaviour (due to reduced interface-, and oxide charge density), current-voltage characteristics degrade due to a higher leakage current after thermal treatment at higher temperatures. The Flatband-voltage values for the TiN-, Mo-, and Ni-capacitors indicate mid-gap pinning of the metal gates, however, Ni seems to be thermally unstable on ZrO2, at least within the process scheme we applied.
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- Bolmstedt, Jon, et al.
(författare)
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A benchmark study of controlled emptying of equalization basins
- 2005
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Ingår i: Water Science and Technology. - 0273-1223. ; 52:12, s. 113-121
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Tidskriftsartikel (refereegranskat)abstract
- Storm tanks, or equalization basins, have been used for many years in sewer or wastewater treatment systems to reduce the amount of combined sewer overflows. In this paper, a systematic control of an equalization basin is used not only to dampen or reduce the hydraulic load, but also to systematically improve the effluent quality in a nitrogen removal plant. It is demonstrated that the effluent ammonia concentration is the key component. The Benchmark Simulation Model 1, implemented in MATLAB/Simulink, has been used to perform the evaluations. It has been extended with systematic rainfall generations. Intuitively, it is apparent that the equalization basin should be emptied before a rainfall. This requires a prediction capacity. It is shown that the choice of prediction time is by no means trivial and it is not true that a long prediction horizon is a,ways advantageous.
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- Damayanti, A., et al.
(författare)
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Determination of KLa, COD fractionations and Heterotrophic yield of palm oil mill effluent (POME)
- 2008
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Konferensbidrag (refereegranskat)abstract
- Activated sludge models (ASMs) have been widely used as a basis for further model development in wastewater treatment processes. Values for parameters to be used are vital for the accuracy of the modeling approach. A continuous stirred tank reactor (CSTR), as open respirometer with continuous flow for 20 h is used in ASMs. The dissolved oxygen (DO) profile for 11 days was monitored. It was found the mass transfer coefficient KLa is 0.3 h−1 during lag and start feed phase and 0.01 h−1 during stop feed phase, while the heterotrophic yield coefficient YH is 0.44. Some of the chemical oxygen demand (COD) fractionations of palm oil mill effluent (POME) using respirometric test in ASM models are Ss 50 mg/L, SI 16,600 mg/L, XS 25,550 mg/L, and XI 2,800 mg/L. The comparison of experimental and ASM1 from OUR concentration is found to fit well.
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