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- Petersson, Sture, et al.
(författare)
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Oxygen distribution profiles in thin evaporated contacts on single crystal silicon
- 1978
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Ingår i: Nuclear instruments and methods. ; 149, s. 285-288
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Tidskriftsartikel (refereegranskat)abstract
- The nuclear resonance in the l6O(a, a)l6O elastic scattering reaction at 3.045 MeV has been used in concentration profilemeasurements ol oxygen in thin-film structuresThe concentration profile can be deduced lrom an energy scan ol the incoming a-particies, thus shifting the resonanceto different depths in the sample. The methocl has been applie
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