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| 2. |
- Rosen, Johanna, et al.
(författare)
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Influence of gas entry point on plasma chemistry, ion energy and deposited alumina thin films in filtered cathodic arc
- 2007
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Ingår i: Plasma chemistry and plasma processing. - : Springer Science Business Media. - 0272-4324 .- 1572-8986. ; 27:5, s. 599-608
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Tidskriftsartikel (refereegranskat)abstract
- The effect of gas entry point on the plasma chemistry, ion energy distributions and resulting alumina thin film growth have been investigated for a d.c. cathodic arc with an aluminum cathode operated in an oxygen/argon atmosphere. Ions of aluminum, oxygen and argon, as well as ions originating from the residual gas are investigated, and measurements for gas entry at both the cathode and close to the substrate are compared. The latter was shown to result in higher ion flux, lower levels of ionised residual gas, and lower ion energies, as compared to gas inlet at the cathode. These plasma conditions that apply when gas entry at the substrate is used result in a higher film deposition rate, less residual gas incorporation, and more stoichiometric alumina films. The results show that the choice of gas entry point is a crucial parameter in thin film growth using reactive PVD processes such as reactive cathodic arc deposition.
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| 3. |
- Rosen, Johanna, et al.
(författare)
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Oxygen incorporation in Ti2AlC thin films
- 2008
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Ingår i: Applied Physics Letters. - : American Institute of Physics. - 0003-6951 .- 1077-3118. ; 92:6, s. 064102-
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Tidskriftsartikel (refereegranskat)abstract
- Thin films of Ti2AlC MAX phase have been deposited using a multiple cathode pulsed cathodic arc. Evidence for substantial oxygen incorporation in the MAX phase is presented, likely originating from residual gas present in the vacuum chamber during deposition. The characteristic MAX phase crystal structure is maintained, in agreement with ab initio calculations, supporting substitutional O in C lattice positions. On the basis of these results, we propose the existence of a MAX phase-like material with material properties tuned by the incorporation of oxygen. Additionally, possible unintentional O incorporation in previously reported MAX phase materials is suggested.
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| 5. |
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| 6. |
- Persson, Per, et al.
(författare)
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Formation of the MAX-phase oxycarbide Ti2AlC1-xOx studied via electron energy-loss spectroscopy and first-principles calculations
- 2009
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Ingår i: PHYSICAL REVIEW B. - 1098-0121. ; 80:9, s. 092102-
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Tidskriftsartikel (refereegranskat)abstract
- Oxygen incorporation in the Ti2AlC MAX phase and TiC was investigated in the electron microscope using spatially resolved fine-structure electron energy-loss spectroscopy analysis. Corresponding fine structures were calculated within the full-potential-linearized augmented plane-wave framework. In the calculations, oxygen was substituted for aluminum and carbon in Ti2AlC as well as for carbon in TiC, in concentrations of 3.1, 6.2, and 12.5 at %. Comparison of calculated and measured spectra shows that oxygen is incorporated on the carbon site in both TiC and Ti2AlC. These findings reveal the existence of MAX phase oxycarbide MA(O,C) alloys and O as a third X element in addition to C and N.
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| 7. |
- Persson, P.O.A., et al.
(författare)
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A solid phase reaction between Ti Cx thin films and Al2 O3 substrates
- 2008
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 103:6
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Tidskriftsartikel (refereegranskat)abstract
- Ti Cx thin films were deposited on Al2 O3 substrates at 900 °C by using a multiple cathode high current pulsed cathodic arc. The Ti:C pulse ratio and, hence, the composition was varied from C rich to Ti rich. It is found that the Al2 O3 substrate is decomposed and reacts with the Ti Cx film to incorporate significant amounts of O and Al in the growing film. When the stoichiometry is suitable, epitaxially oriented Ti2 AlC MAX phase with significant O incorporated is formed. The results indicate that Al2 O3 is not an ideal substrate material for the growth of transition metal carbides and MAX phase thin films. © 2008 American Institute of Physics.
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| 8. |
- Rosen, Johanna, et al.
(författare)
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Amorphous and crystalline phases in thermal quench simulations of alumina
- 2007
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Ingår i: Journal of Chemical Physics. - : American Institute of Physics. - 0021-9606 .- 1089-7690. ; 126:20, s. 204709-
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Tidskriftsartikel (refereegranskat)abstract
- The authors report molecular dynamics simulations of alumina (Al2O3) during crystallization from the melt. Using liquid quench methods, they investigate the effect of cooling rate on the structural evolution of the alpha, kappa, and the bixbyite phases. A critical temperature window is identified, where the time spent in this window is crucial in determining the extent to which the systems approach crystallinity. A strong dependence is observed between the final structure and the quench rate, which is most pronounced for the alpha phase and to lesser extent for the other phases. The results show that the different phases have different tendencies to crystallize that are determined by energetics, complexity of crystal structure, and the number of metastable states.
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| 9. |
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| 10. |
- Öjekull, Jenny, 1973, et al.
(författare)
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Dissociative recombination of ammonia clusters studied by storage ring experiments
- 2006
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Ingår i: Journal of Chemical Physics. - : AIP Publishing. - 0021-9606 .- 1089-7690. ; 125:19, s. 194306-
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Tidskriftsartikel (refereegranskat)abstract
- Dissociative recombination of ammonia cluster ions with free electrons has been studied at the heavy-ion storage ring CRYRING (Manne Siegbahn Laboratory, Stockholm University). The absolute cross sections for dissociative recombination of H+(NH3)(2), H+(NH3)(3), D+(ND3)(2), and D+(ND3)(3) in the collision energy range of 0.001-27 eV are reported, and thermal rate coefficients for the temperature interval from 10 to 1000 K are calculated from the experimental data and compared with earlier results. The fragmentation patterns for the two ions H+(NH3)(2) and D+(ND3)(2) show no clear isotope effect. Dissociative recombination of X+(NX3)(2) (X=H or D) is dominated by the product channels 2NX(3)+X [0.95 +/- 0.02 for H+(NH3)(2) and 1.00 +/- 0.02 for D+(ND3)(2)]. Dissociative recombination of D+(ND3)(3) is dominated by the channels yielding three N-containing fragments (0.95 +/- 0.05).
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