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- Carlborg, Carl Fredrik, 1981-, et al.
(författare)
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LOW TEMPERATURE “CLICK” WAFER BONDING OF OFF-STOICHIOMETRY THIOL-ENE (OSTE) POLYMERS TO SILICON
- 2011
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Ingår i: 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2011). - 9781618395955 ; , s. 1143-1145
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Konferensbidrag (refereegranskat)abstract
- We present a low temperature (< 37°C) wafer-scale microfluidic batch packaging process using covalent, dry bonding of offstoichiometry thiol-ene polymers (OSTE), enabling rapid, bio-compatible integration of fluidics on wafer-scale in combination with excellent polymer properties.
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