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- Berglund, Martin, 1985-, et al.
(författare)
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Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt
- 2016
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Ingår i: 27th Micromechanics And Microsystems Europe Workshop (MME 2016). - : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.
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2. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Fabrication of Suspended All-Metal Sensor Elements in Ceramic Laminates
- 2016
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Ingår i: Proc. of Micronano System Workshop 2016, Lund, Sweden, May 17-18, 2016.
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- To target a wide range of high-temperature applications [1-4], the Ångström Space Technology Centre has added High-Temperature Co-fired Ceramics, HTTC, technology to its repertoire. Usually, this technology follows a processing scheme where thin sheets of green-body ceramics are metallized through screen printing and structured by embossing, punching or milling, before they are laminated and sintered to form components. A limitation with this, is the difficulty of realizing freely suspended metal structures, which is a disadvantage in, e.g., the fabrication of calorimetric sensors or electric field probes. In this work, the embedding of platinum wires in HTCC is explored experimentally, and demonstrated for use in pressure and plasma I-V sensing.
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