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- Finder, C, et al.
(författare)
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Fluorescence microscopy for quality control in nanoimprint lithography
- 2003
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Ingår i: Microelectronic Engineering (Proceedings of the 28th International Conference on Micro- and Nano-Engineering). - 0167-9317 .- 1873-5568. ; 67-8, s. 623-628
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Konferensbidrag (refereegranskat)abstract
- Fluorescence microscopy is introduced as a low cost quality control process for nanoimprint lithography. To depict imprinted structures down to 1 mum lateral size and to detect residues down to 100 nm lateral size, the standard printable polymer mr-18000 is labelled with less than 0.1 wt.% fluorescent dye. Three different types of stamps are used to determine the dependence of the shape and size of stamp features in a series of imprints. The quality of a stamp is given by the sticking polymer residues per unit area. Fluorescence light images as well as visible light images are analysed. Changes in the area of the stamp covered with polymer as a function of the number of imprints is summarised in a statistical process chart. Adhesion was artificially induced in order to observe self cleaning of virgin stamps. They were detected and monitored, suggesting that this method is a suitable technique for quality control and that it could be easily adapted to the nanoimprint process. (C) 2003 Elsevier Science B.V. All rights reserved.
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- Perez-Torres, M. A., et al.
(författare)
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High-resolution radio imaging of young supernovae
- 2004
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Rapport (övrigt vetenskapligt/konstnärligt)abstract
- The high resolution obtained through the use of VLBI gives an unique opportunity to directly observe the interaction of an expanding radio supernova with its surrounding medium. We present here results from our VLBI observations of the young supernovae SN 1979C, SN 1986J, and SN 2001gd.
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- Pfeiffer, K, et al.
(författare)
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A comparison of thermally and photochemically cross-linked polymers for nanoimprinting
- 2003
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Ingår i: Microelectronic Engineering. - 1873-5568. ; 67-8, s. 266-273
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Tidskriftsartikel (refereegranskat)abstract
- The characteristics and benefits of two types of cross-linking prepolymers with low glass transition temperature (T-g) for nanoimprinting are reported. They are soluble in organic solvents and their solutions can be processed like those of common thermoplastics. The imprinted patterns receive high thermal and mechanical stability through cross-linking polymerization. The course of the polymerization was investigated to determine the appropriate conditions for the imprint process. In thermally cross-linked polymers mr-I 9000, the cross-linking occurs during imprinting. Process time and temperature depend on the polymerization rate. Volume shrinkage during the polymerization does not adversely affect imprinting. Photochemically cross-linked polymers mr-L 6000 make possible imprint temperatures below 100 T and short imprint times. The T-g of the prepolymer determines the imprint temperature. The cross-linking reaction and structural stabilization is performed after imprinting. 50-nm trenches and sub-50-nm dots confirm the successful application of the polymers.
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- Leigh, R. S., et al.
(författare)
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Vibrational modes of sulfur defects in GaP
- 2003
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Ingår i: Physical Review B. Condensed Matter and Materials Physics. - 1098-0121 .- 1550-235X. ; 68:3
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Tidskriftsartikel (refereegranskat)abstract
- First principles calculations carried out on GaP containing sulfur donors 32SP (95%) and34SP (5%) show that both the neutral and ionized donors are located on substitutional sites and have weak S-Ga bonds. For the sulfur impurity in its positive charge state the calculations give gap modes for 32S and34S at frequencies close to those found experimentally. Modes within the gap are also predicted for neutral sulfur at frequencies within a few cm-1 of their charged-state counterparts. However, the SP0 donor has a very low apparent charge (i.e. oscillator strength), its calculated integrated absorption cross section being only ∼3% of that for the SP+ defect. These results support an earlier explanation of the failure to detect gap modes from SP0 in infrared measurements. Calculated and observed apparent charges for the SP+ donor are compared, and the importance of taking due account of the different geometries that apply to the theoretical calculations and infrared experiments is emphasized.
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