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Sökning: id:"swepub:oai:DiVA.org:miun-38982" > A Novel Dry Selecti...

A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm

Li, Junjie (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Li, Yongliang (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Zhou, Na (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
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Wang, Guilei (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Zhang, Qingzhu (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Gen Res Inst Nonferrous Met, State Key Lab Adv Mat Smart Sensing, Beijing 100088, Peoples R China.
Du, Anyan (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Zhang, Yongkui (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Gao, Jianfeng (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Kong, Zhenzhen (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Lin, Hongxiao (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Xiang, Jinjuan (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Li, Chen (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Yin, Xiaogen (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Li, Yangyang (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Wang, Xiaolei (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Yang, Hong (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Ma, Xueli (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Han, Jianghao (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Zhang, Jing (författare)
North China Univ Technol, Coll Elect & Informat Engn, Beijing 100144, Peoples R China.
Hu, Tairan (författare)
North China Univ Technol, Coll Elect & Informat Engn, Beijing 100144, Peoples R China.
Yang, Tao (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Li, Junfeng (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.
Yin, Huaxiang (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Zhu, Huilong (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Wang, Wenwu (författare)
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China.
Radamson, Henry H. (författare)
Mittuniversitetet,Institutionen för elektronikkonstruktion,Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China
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Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China;Univ Chinese Acad Sci, Microelect Inst, Beijing 100049, Peoples R China. Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China. (creator_code:org_t)
2020-02-07
2020
Engelska.
Ingår i: Materials. - : MDPI AG. - 1996-1944 .- 1996-1944. ; 13:3
Relaterad länk:
https://doi.org/10.3...
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https://miun.diva-po... (primary) (Raw object)
https://res.mdpi.com...
https://urn.kb.se/re...
https://doi.org/10.3...
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  • Tidskriftsartikel (refereegranskat)
Abstract Ämnesord
Stäng  
  • Semiconductor nanowires have great application prospects in field effect transistors and sensors. In this study, the process and challenges of manufacturing vertical SiGe/Si nanowire array by using the conventional lithography and novel dry atomic layer etching technology. The final results demonstrate that vertical nanowires with a diameter less than 20 nm can be obtained. The diameter of nanowires is adjustable with an accuracy error less than 0.3 nm. This technology provides a new way for advanced 3D transistors and sensors.

Ämnesord

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

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